JPH0145176B2 - - Google Patents

Info

Publication number
JPH0145176B2
JPH0145176B2 JP57118228A JP11822882A JPH0145176B2 JP H0145176 B2 JPH0145176 B2 JP H0145176B2 JP 57118228 A JP57118228 A JP 57118228A JP 11822882 A JP11822882 A JP 11822882A JP H0145176 B2 JPH0145176 B2 JP H0145176B2
Authority
JP
Japan
Prior art keywords
sample
detector
electric field
charged particle
secondary charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57118228A
Other languages
English (en)
Japanese (ja)
Other versions
JPS599843A (ja
Inventor
Hiromoto Kawamoto
Kazunori Fumya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP57118228A priority Critical patent/JPS599843A/ja
Publication of JPS599843A publication Critical patent/JPS599843A/ja
Publication of JPH0145176B2 publication Critical patent/JPH0145176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57118228A 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置 Granted JPS599843A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57118228A JPS599843A (ja) 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57118228A JPS599843A (ja) 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Publications (2)

Publication Number Publication Date
JPS599843A JPS599843A (ja) 1984-01-19
JPH0145176B2 true JPH0145176B2 (enrdf_load_stackoverflow) 1989-10-02

Family

ID=14731392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57118228A Granted JPS599843A (ja) 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Country Status (1)

Country Link
JP (1) JPS599843A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6386340A (ja) * 1986-09-30 1988-04-16 Fujitsu Ltd 一次粒子線照射装置
WO2017006408A1 (ja) * 2015-07-06 2017-01-12 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112767A (en) * 1974-07-22 1976-01-31 Nippon Electron Optics Lab Sosagatadenshikenbikyo

Also Published As

Publication number Publication date
JPS599843A (ja) 1984-01-19

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