JPS599843A - 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置 - Google Patents

走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Info

Publication number
JPS599843A
JPS599843A JP57118228A JP11822882A JPS599843A JP S599843 A JPS599843 A JP S599843A JP 57118228 A JP57118228 A JP 57118228A JP 11822882 A JP11822882 A JP 11822882A JP S599843 A JPS599843 A JP S599843A
Authority
JP
Japan
Prior art keywords
detectors
sample
secondary charged
charged particle
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57118228A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145176B2 (enrdf_load_stackoverflow
Inventor
Hiromoto Kawamoto
裕資 川本
Kazunori Fumiya
文屋　和則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP57118228A priority Critical patent/JPS599843A/ja
Publication of JPS599843A publication Critical patent/JPS599843A/ja
Publication of JPH0145176B2 publication Critical patent/JPH0145176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57118228A 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置 Granted JPS599843A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57118228A JPS599843A (ja) 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57118228A JPS599843A (ja) 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Publications (2)

Publication Number Publication Date
JPS599843A true JPS599843A (ja) 1984-01-19
JPH0145176B2 JPH0145176B2 (enrdf_load_stackoverflow) 1989-10-02

Family

ID=14731392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57118228A Granted JPS599843A (ja) 1982-07-07 1982-07-07 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置

Country Status (1)

Country Link
JP (1) JPS599843A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785188A (en) * 1986-09-30 1988-11-15 Fujitsu Limited Primary particle beam irradiation apparatus and method of irradiation thereof
WO2017006408A1 (ja) * 2015-07-06 2017-01-12 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112767A (en) * 1974-07-22 1976-01-31 Nippon Electron Optics Lab Sosagatadenshikenbikyo

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112767A (en) * 1974-07-22 1976-01-31 Nippon Electron Optics Lab Sosagatadenshikenbikyo

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785188A (en) * 1986-09-30 1988-11-15 Fujitsu Limited Primary particle beam irradiation apparatus and method of irradiation thereof
WO2017006408A1 (ja) * 2015-07-06 2017-01-12 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
US10734191B2 (en) 2015-07-06 2020-08-04 Hitachi High-Tech Corporation Charged particle beam device
US10971328B2 (en) 2015-07-06 2021-04-06 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPH0145176B2 (enrdf_load_stackoverflow) 1989-10-02

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