JPS6314813B2 - - Google Patents
Info
- Publication number
- JPS6314813B2 JPS6314813B2 JP55105515A JP10551580A JPS6314813B2 JP S6314813 B2 JPS6314813 B2 JP S6314813B2 JP 55105515 A JP55105515 A JP 55105515A JP 10551580 A JP10551580 A JP 10551580A JP S6314813 B2 JPS6314813 B2 JP S6314813B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- magnetic pole
- pole piece
- upper magnetic
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 4
- 230000005284 excitation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10551580A JPS5730252A (en) | 1980-07-31 | 1980-07-31 | Signal detector in electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10551580A JPS5730252A (en) | 1980-07-31 | 1980-07-31 | Signal detector in electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5730252A JPS5730252A (en) | 1982-02-18 |
| JPS6314813B2 true JPS6314813B2 (enrdf_load_stackoverflow) | 1988-04-01 |
Family
ID=14409730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10551580A Granted JPS5730252A (en) | 1980-07-31 | 1980-07-31 | Signal detector in electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5730252A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037163U (ja) * | 1983-08-22 | 1985-03-14 | 日本電子株式会社 | 走査電子顕微鏡 |
-
1980
- 1980-07-31 JP JP10551580A patent/JPS5730252A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5730252A (en) | 1982-02-18 |