JPS6080284A - 超伝導素子製造における合金層の形成方法 - Google Patents
超伝導素子製造における合金層の形成方法Info
- Publication number
- JPS6080284A JPS6080284A JP58188470A JP18847083A JPS6080284A JP S6080284 A JPS6080284 A JP S6080284A JP 58188470 A JP58188470 A JP 58188470A JP 18847083 A JP18847083 A JP 18847083A JP S6080284 A JPS6080284 A JP S6080284A
- Authority
- JP
- Japan
- Prior art keywords
- alloy layer
- grain size
- alloy
- thickness
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 54
- 239000000956 alloy Substances 0.000 title claims abstract description 54
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 230000015572 biosynthetic process Effects 0.000 title abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000005275 alloying Methods 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 150000002739 metals Chemical class 0.000 claims abstract description 5
- 238000000151 deposition Methods 0.000 claims description 6
- 239000013078 crystal Substances 0.000 abstract description 11
- 239000000758 substrate Substances 0.000 abstract description 8
- 229910052737 gold Inorganic materials 0.000 abstract description 7
- 238000001704 evaporation Methods 0.000 abstract description 6
- 229910052738 indium Inorganic materials 0.000 abstract description 6
- 230000008020 evaporation Effects 0.000 abstract description 5
- 229910052745 lead Inorganic materials 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 101100172879 Caenorhabditis elegans sec-5 gene Proteins 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001325 element alloy Inorganic materials 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 239000004177 patent blue V Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000013518 transcription Methods 0.000 description 1
- 230000035897 transcription Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58188470A JPS6080284A (ja) | 1983-10-11 | 1983-10-11 | 超伝導素子製造における合金層の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58188470A JPS6080284A (ja) | 1983-10-11 | 1983-10-11 | 超伝導素子製造における合金層の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6080284A true JPS6080284A (ja) | 1985-05-08 |
| JPS6260834B2 JPS6260834B2 (enrdf_load_stackoverflow) | 1987-12-18 |
Family
ID=16224282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58188470A Granted JPS6080284A (ja) | 1983-10-11 | 1983-10-11 | 超伝導素子製造における合金層の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6080284A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140439U (enrdf_load_stackoverflow) * | 1988-03-17 | 1989-09-26 |
-
1983
- 1983-10-11 JP JP58188470A patent/JPS6080284A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6260834B2 (enrdf_load_stackoverflow) | 1987-12-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69102851T2 (de) | Verfahren zur Herstellung eines Ti/TiN/Al Kontaktes unter Benutzung eines reaktiven Zerstäubungsprozesses. | |
| EP0002433B1 (de) | Verfahren zum Herstellen von Silicium-Photoelementen | |
| DE2215526C3 (de) | Verfahren zum Herstellen eines sperrfreien Metallanschlußkontaktes an p- oder n-leitende Halbleiterkörper | |
| US4166279A (en) | Electromigration resistance in gold thin film conductors | |
| JPS5983997A (ja) | エピタキシヤル多成分材料を含むヘテロ構造の形成方法 | |
| DE68908520T2 (de) | Durch Zerstäubung abgeschiedene Nickelschicht und Verfahren zu deren Abscheidung. | |
| US3113376A (en) | Alloying | |
| JP4394452B2 (ja) | エピタキシャル被覆用の金属ストリップ及びその製造方法 | |
| US4035526A (en) | Evaporated solderable multilayer contact for silicon semiconductor | |
| JPH06151815A (ja) | 半導体装置とその製造方法 | |
| US3959522A (en) | Method for forming an ohmic contact | |
| JP2004183023A (ja) | メタルマスク | |
| JPS6080284A (ja) | 超伝導素子製造における合金層の形成方法 | |
| JPH01302875A (ja) | 装置およびその製造方法 | |
| DE1816748C3 (de) | Halbleiteranordnung und Verfahren zu ihrer Herstellung | |
| JP3433937B2 (ja) | 超伝導性合金を製造する方法 | |
| DE3604741A1 (de) | Homogener, feinkoerniger metallfilm auf einem traegermaterial und dessen herstellungsverfahren | |
| DE3636366C2 (enrdf_load_stackoverflow) | ||
| US4923526A (en) | Homogeneous fine grained metal film on substrate and manufacturing method thereof | |
| EP0033358B1 (en) | Process for fabricating thin metal superconducting films of improved thermal cyclability and device | |
| JPH07122724A (ja) | ｎ型半導体立方晶窒化ホウ素のオ−ミック電極およびその形成方法 | |
| DE4401858A1 (de) | Verfahren zur Herstellung eines ohmschen Kontaktes auf P-leitenden III-V-Verbindungshalbleiter | |
| JPS62274624A (ja) | 半導体装置の製造方法 | |
| JP4676089B2 (ja) | ＭｇＢ２超電導線材の製造方法 | |
| JPS6038823A (ja) | 半導体装置 |