JPS6260834B2 - - Google Patents
Info
- Publication number
- JPS6260834B2 JPS6260834B2 JP58188470A JP18847083A JPS6260834B2 JP S6260834 B2 JPS6260834 B2 JP S6260834B2 JP 58188470 A JP58188470 A JP 58188470A JP 18847083 A JP18847083 A JP 18847083A JP S6260834 B2 JPS6260834 B2 JP S6260834B2
- Authority
- JP
- Japan
- Prior art keywords
- alloy layer
- alloy
- layer
- thickness
- grain size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910045601 alloy Inorganic materials 0.000 claims description 60
- 239000000956 alloy Substances 0.000 claims description 60
- 238000000034 method Methods 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000005275 alloying Methods 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 150000002739 metals Chemical class 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000008021 deposition Effects 0.000 description 11
- 239000013078 crystal Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052738 indium Inorganic materials 0.000 description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 229910001325 element alloy Inorganic materials 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58188470A JPS6080284A (ja) | 1983-10-11 | 1983-10-11 | 超伝導素子製造における合金層の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58188470A JPS6080284A (ja) | 1983-10-11 | 1983-10-11 | 超伝導素子製造における合金層の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6080284A JPS6080284A (ja) | 1985-05-08 |
| JPS6260834B2 true JPS6260834B2 (enrdf_load_stackoverflow) | 1987-12-18 |
Family
ID=16224282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58188470A Granted JPS6080284A (ja) | 1983-10-11 | 1983-10-11 | 超伝導素子製造における合金層の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6080284A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140439U (enrdf_load_stackoverflow) * | 1988-03-17 | 1989-09-26 |
-
1983
- 1983-10-11 JP JP58188470A patent/JPS6080284A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140439U (enrdf_load_stackoverflow) * | 1988-03-17 | 1989-09-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6080284A (ja) | 1985-05-08 |
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