JPS6078137U - ウエ−ハ搬送装置 - Google Patents

ウエ−ハ搬送装置

Info

Publication number
JPS6078137U
JPS6078137U JP17080883U JP17080883U JPS6078137U JP S6078137 U JPS6078137 U JP S6078137U JP 17080883 U JP17080883 U JP 17080883U JP 17080883 U JP17080883 U JP 17080883U JP S6078137 U JPS6078137 U JP S6078137U
Authority
JP
Japan
Prior art keywords
holding jig
transfer device
wafer transfer
arm
transfer arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17080883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0142340Y2 (enEXAMPLES
Inventor
俊幸 加藤
博至 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP17080883U priority Critical patent/JPS6078137U/ja
Publication of JPS6078137U publication Critical patent/JPS6078137U/ja
Application granted granted Critical
Publication of JPH0142340Y2 publication Critical patent/JPH0142340Y2/ja
Granted legal-status Critical Current

Links

JP17080883U 1983-11-02 1983-11-02 ウエ−ハ搬送装置 Granted JPS6078137U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17080883U JPS6078137U (ja) 1983-11-02 1983-11-02 ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17080883U JPS6078137U (ja) 1983-11-02 1983-11-02 ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS6078137U true JPS6078137U (ja) 1985-05-31
JPH0142340Y2 JPH0142340Y2 (enEXAMPLES) 1989-12-12

Family

ID=30372780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17080883U Granted JPS6078137U (ja) 1983-11-02 1983-11-02 ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS6078137U (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024236U (enEXAMPLES) * 1989-06-12 1990-01-11

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129964A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Method and device for inserting and taking out of heat treatment jig
JPS54159170A (en) * 1978-06-07 1979-12-15 Hitachi Ltd Tool for wafer processing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129964A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Method and device for inserting and taking out of heat treatment jig
JPS54159170A (en) * 1978-06-07 1979-12-15 Hitachi Ltd Tool for wafer processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024236U (enEXAMPLES) * 1989-06-12 1990-01-11

Also Published As

Publication number Publication date
JPH0142340Y2 (enEXAMPLES) 1989-12-12

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