JPH0142340Y2 - - Google Patents

Info

Publication number
JPH0142340Y2
JPH0142340Y2 JP1983170808U JP17080883U JPH0142340Y2 JP H0142340 Y2 JPH0142340 Y2 JP H0142340Y2 JP 1983170808 U JP1983170808 U JP 1983170808U JP 17080883 U JP17080883 U JP 17080883U JP H0142340 Y2 JPH0142340 Y2 JP H0142340Y2
Authority
JP
Japan
Prior art keywords
holding jig
arm
transfer arm
heat treatment
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983170808U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6078137U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17080883U priority Critical patent/JPS6078137U/ja
Publication of JPS6078137U publication Critical patent/JPS6078137U/ja
Application granted granted Critical
Publication of JPH0142340Y2 publication Critical patent/JPH0142340Y2/ja
Granted legal-status Critical Current

Links

JP17080883U 1983-11-02 1983-11-02 ウエ−ハ搬送装置 Granted JPS6078137U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17080883U JPS6078137U (ja) 1983-11-02 1983-11-02 ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17080883U JPS6078137U (ja) 1983-11-02 1983-11-02 ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS6078137U JPS6078137U (ja) 1985-05-31
JPH0142340Y2 true JPH0142340Y2 (enEXAMPLES) 1989-12-12

Family

ID=30372780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17080883U Granted JPS6078137U (ja) 1983-11-02 1983-11-02 ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS6078137U (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0632678Y2 (ja) * 1989-06-12 1994-08-24 信越石英株式会社 ウエーハボート搬送用保持治具

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129964A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Method and device for inserting and taking out of heat treatment jig
JPS54159170A (en) * 1978-06-07 1979-12-15 Hitachi Ltd Tool for wafer processing

Also Published As

Publication number Publication date
JPS6078137U (ja) 1985-05-31

Similar Documents

Publication Publication Date Title
CN212245216U (zh) 一种电芯中转装置及电芯上下料设备
JPH05146935A (ja) 物品ハンドリング装置
CN211870553U (zh) 电池清洗装置
JPH0142340Y2 (enEXAMPLES)
US4930206A (en) Apparatus and method for fixing and positioning a nut plate
US20180337080A1 (en) Semiconductor wafer carriers
JPS6328599Y2 (enEXAMPLES)
CN216459865U (zh) 一种点胶机上下层轨道结构
CN213504889U (zh) 一种机器人堆垛推车的定位设备
CN113257723B (zh) 半导体工艺设备
CN215787647U (zh) 一种集装箱前后框组装平台
JP2825101B2 (ja) ウエハ用フレームの移動装置
JP4635350B2 (ja) 搬送装置
CN214166540U (zh) 一种搬运助力机械手的天窗搬运托盘
JPH0741436B2 (ja) 平板へのリブ溶接装置
JPH11239937A (ja) パレットクランプ装置
JPS5890330A (ja) プレス曲げ加工装置における板状被加工材の搬送装置
JPS6145105Y2 (enEXAMPLES)
CN113459315B (zh) 一种多晶硅开方生产线
JP2566734Y2 (ja) 搬送ハンド
CN221164814U (zh) 同步运输机构和同步运输生产线
JPH0220834Y2 (enEXAMPLES)
CN113305554B (zh) 卡装设备及其卡装方法
JP3937512B2 (ja) 基板の移載装置
JP2006137499A (ja) ワーク取外し装置