JPS6077173A - 窒化けい素焼結体およびその製造法 - Google Patents
窒化けい素焼結体およびその製造法Info
- Publication number
- JPS6077173A JPS6077173A JP58180625A JP18062583A JPS6077173A JP S6077173 A JPS6077173 A JP S6077173A JP 58180625 A JP58180625 A JP 58180625A JP 18062583 A JP18062583 A JP 18062583A JP S6077173 A JPS6077173 A JP S6077173A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered body
- conductivity
- manufacture
- nitride sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000843 powder Substances 0.000 claims description 17
- 238000005245 sintering Methods 0.000 claims description 10
- 229910052745 lead Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims 2
- 229910052765 Lutetium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- GOLCXWYRSKYTSP-UHFFFAOYSA-N Arsenious Acid Chemical compound O1[As]2O[As]1O2 GOLCXWYRSKYTSP-UHFFFAOYSA-N 0.000 description 6
- 238000009760 electrical discharge machining Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910002785 ReO3 Inorganic materials 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- YSZJKUDBYALHQE-UHFFFAOYSA-N rhenium trioxide Chemical compound O=[Re](=O)=O YSZJKUDBYALHQE-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58180625A JPS6077173A (ja) | 1983-09-30 | 1983-09-30 | 窒化けい素焼結体およびその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58180625A JPS6077173A (ja) | 1983-09-30 | 1983-09-30 | 窒化けい素焼結体およびその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6077173A true JPS6077173A (ja) | 1985-05-01 |
| JPS632914B2 JPS632914B2 (enrdf_load_stackoverflow) | 1988-01-21 |
Family
ID=16086472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58180625A Granted JPS6077173A (ja) | 1983-09-30 | 1983-09-30 | 窒化けい素焼結体およびその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6077173A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6241764A (ja) * | 1985-08-15 | 1987-02-23 | 株式会社日立製作所 | 窒化珪素焼結体 |
| WO2013167518A3 (de) * | 2012-05-10 | 2014-01-03 | Schaeffler Technologies AG & Co. KG | Siliziumnitridkeramik sowie verfahren zu deren herstellung |
-
1983
- 1983-09-30 JP JP58180625A patent/JPS6077173A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6241764A (ja) * | 1985-08-15 | 1987-02-23 | 株式会社日立製作所 | 窒化珪素焼結体 |
| WO2013167518A3 (de) * | 2012-05-10 | 2014-01-03 | Schaeffler Technologies AG & Co. KG | Siliziumnitridkeramik sowie verfahren zu deren herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS632914B2 (enrdf_load_stackoverflow) | 1988-01-21 |
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