JPS6076024A - 垂直磁気記録体の製造装置 - Google Patents
垂直磁気記録体の製造装置Info
- Publication number
- JPS6076024A JPS6076024A JP18368883A JP18368883A JPS6076024A JP S6076024 A JPS6076024 A JP S6076024A JP 18368883 A JP18368883 A JP 18368883A JP 18368883 A JP18368883 A JP 18368883A JP S6076024 A JPS6076024 A JP S6076024A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- evaporation
- upstream side
- evaporation source
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000001704 evaporation Methods 0.000 claims abstract description 46
- 230000008020 evaporation Effects 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims abstract description 31
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 17
- 230000008021 deposition Effects 0.000 claims description 11
- 230000002265 prevention Effects 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 abstract description 4
- 238000007740 vapor deposition Methods 0.000 abstract 3
- 235000013290 Sagittaria latifolia Nutrition 0.000 abstract 1
- 235000015246 common arrowhead Nutrition 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18368883A JPS6076024A (ja) | 1983-10-01 | 1983-10-01 | 垂直磁気記録体の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18368883A JPS6076024A (ja) | 1983-10-01 | 1983-10-01 | 垂直磁気記録体の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6076024A true JPS6076024A (ja) | 1985-04-30 |
| JPH0418373B2 JPH0418373B2 (enExample) | 1992-03-27 |
Family
ID=16140189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18368883A Granted JPS6076024A (ja) | 1983-10-01 | 1983-10-01 | 垂直磁気記録体の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6076024A (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814326A (ja) * | 1981-07-16 | 1983-01-27 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
| JPS5896868A (ja) * | 1981-12-02 | 1983-06-09 | Matsushita Electric Ind Co Ltd | 反応蒸着装置 |
| JPS58105433A (ja) * | 1981-12-18 | 1983-06-23 | Nippon Telegr & Teleph Corp <Ntt> | 磁気記録媒体の製造装置 |
| JPS59175036A (ja) * | 1983-03-24 | 1984-10-03 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
-
1983
- 1983-10-01 JP JP18368883A patent/JPS6076024A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814326A (ja) * | 1981-07-16 | 1983-01-27 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
| JPS5896868A (ja) * | 1981-12-02 | 1983-06-09 | Matsushita Electric Ind Co Ltd | 反応蒸着装置 |
| JPS58105433A (ja) * | 1981-12-18 | 1983-06-23 | Nippon Telegr & Teleph Corp <Ntt> | 磁気記録媒体の製造装置 |
| JPS59175036A (ja) * | 1983-03-24 | 1984-10-03 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0418373B2 (enExample) | 1992-03-27 |
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