JPS6074476A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS6074476A JPS6074476A JP59184112A JP18411284A JPS6074476A JP S6074476 A JPS6074476 A JP S6074476A JP 59184112 A JP59184112 A JP 59184112A JP 18411284 A JP18411284 A JP 18411284A JP S6074476 A JPS6074476 A JP S6074476A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- compound film
- silicon compound
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/62—Electrodes ohmically coupled to a semiconductor
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59184112A JPS6074476A (ja) | 1984-09-03 | 1984-09-03 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59184112A JPS6074476A (ja) | 1984-09-03 | 1984-09-03 | 半導体装置の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55026410A Division JPS6030111B2 (ja) | 1980-03-03 | 1980-03-03 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6074476A true JPS6074476A (ja) | 1985-04-26 |
| JPS617729B2 JPS617729B2 (OSRAM) | 1986-03-08 |
Family
ID=16147595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59184112A Granted JPS6074476A (ja) | 1984-09-03 | 1984-09-03 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6074476A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04297736A (ja) * | 1991-03-06 | 1992-10-21 | Mitsubishi Electric Corp | レンジフードファン |
-
1984
- 1984-09-03 JP JP59184112A patent/JPS6074476A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS617729B2 (OSRAM) | 1986-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3082923B2 (ja) | 半導体装置の製法 | |
| JPS6213819B2 (OSRAM) | ||
| US4803174A (en) | Bipolar transistor integrated circuit and method of manufacturing the same | |
| JPS62237754A (ja) | 半導体集積回路装置及びその製造方法 | |
| JPH01202841A (ja) | 半導体集積回路装置及びその製造方法 | |
| JP2606805B2 (ja) | エミツタ‐ベース複合体の製法 | |
| JP2828438B2 (ja) | 半導体素子のポリサイド層形成方法 | |
| JPS6074476A (ja) | 半導体装置の製造方法 | |
| JPH0222544B2 (OSRAM) | ||
| JPS6184831A (ja) | 半導体装置の製造方法 | |
| JPS63265448A (ja) | Ｍｏｓ型半導体装置の製造方法 | |
| JPS60207375A (ja) | 半導体装置の製造方法 | |
| JPS6030111B2 (ja) | 半導体装置 | |
| JP2523489B2 (ja) | 半導体装置 | |
| JPS5879761A (ja) | 半導体装置 | |
| JPS5935475A (ja) | 半導体装置の製造方法 | |
| JPH0125233B2 (OSRAM) | ||
| JPH03198344A (ja) | 半導体装置およびこれを用いた光電変換装置 | |
| JPS61108162A (ja) | 半導体装置およびその製造方法 | |
| JPS629226B2 (OSRAM) | ||
| JPS58164241A (ja) | 半導体装置の製造方法 | |
| JPH04146626A (ja) | 半導体装置及びその製造方法 | |
| JP2005150509A (ja) | 半導体装置の製造方法 | |
| JPS63308948A (ja) | 半導体装置 | |
| JPS63301556A (ja) | Ｂｉ−ＣＭＯＳ半導体装置 |