JPS6073234U - 半導体ウエハ−の処理装置 - Google Patents

半導体ウエハ−の処理装置

Info

Publication number
JPS6073234U
JPS6073234U JP16437983U JP16437983U JPS6073234U JP S6073234 U JPS6073234 U JP S6073234U JP 16437983 U JP16437983 U JP 16437983U JP 16437983 U JP16437983 U JP 16437983U JP S6073234 U JPS6073234 U JP S6073234U
Authority
JP
Japan
Prior art keywords
wafer processing
tank
semiconductor wafer
nitrogen gas
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16437983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027465Y2 (OSRAM
Inventor
相合　征一郎
Original Assignee
黒谷　巌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　巌 filed Critical 黒谷　巌
Priority to JP16437983U priority Critical patent/JPS6073234U/ja
Publication of JPS6073234U publication Critical patent/JPS6073234U/ja
Application granted granted Critical
Publication of JPH027465Y2 publication Critical patent/JPH027465Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP16437983U 1983-10-24 1983-10-24 半導体ウエハ−の処理装置 Granted JPS6073234U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16437983U JPS6073234U (ja) 1983-10-24 1983-10-24 半導体ウエハ−の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16437983U JPS6073234U (ja) 1983-10-24 1983-10-24 半導体ウエハ−の処理装置

Publications (2)

Publication Number Publication Date
JPS6073234U true JPS6073234U (ja) 1985-05-23
JPH027465Y2 JPH027465Y2 (OSRAM) 1990-02-22

Family

ID=30360402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16437983U Granted JPS6073234U (ja) 1983-10-24 1983-10-24 半導体ウエハ−の処理装置

Country Status (1)

Country Link
JP (1) JPS6073234U (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159029A (en) * 1981-03-25 1982-10-01 Seiichiro Sogo Oxidized film etching device for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159029A (en) * 1981-03-25 1982-10-01 Seiichiro Sogo Oxidized film etching device for semiconductor wafer

Also Published As

Publication number Publication date
JPH027465Y2 (OSRAM) 1990-02-22

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