JPS6071540A - 基板用ガラス - Google Patents
基板用ガラスInfo
- Publication number
- JPS6071540A JPS6071540A JP58176477A JP17647783A JPS6071540A JP S6071540 A JPS6071540 A JP S6071540A JP 58176477 A JP58176477 A JP 58176477A JP 17647783 A JP17647783 A JP 17647783A JP S6071540 A JPS6071540 A JP S6071540A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- pbo
- zno
- thermal expansion
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 75
- 239000000758 substrate Substances 0.000 title claims description 11
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 8
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims abstract 2
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 claims abstract 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 claims description 6
- 239000000126 substance Substances 0.000 abstract description 11
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052593 corundum Inorganic materials 0.000 abstract description 3
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 abstract description 3
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 abstract description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- GOLCXWYRSKYTSP-UHFFFAOYSA-N Arsenious Acid Chemical compound O1[As]2O[As]1O2 GOLCXWYRSKYTSP-UHFFFAOYSA-N 0.000 abstract 2
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 abstract 1
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 abstract 1
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 abstract 1
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 18
- 239000000203 mixture Substances 0.000 description 7
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000005191 phase separation Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 238000004031 devitrification Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000009970 fire resistant effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 101100296544 Caenorhabditis elegans pbo-5 gene Proteins 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 206010040925 Skin striae Diseases 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000006121 base glass Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 235000012215 calcium aluminium silicate Nutrition 0.000 description 1
- 239000000404 calcium aluminium silicate Substances 0.000 description 1
- WNCYAPRTYDMSFP-UHFFFAOYSA-N calcium aluminosilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O WNCYAPRTYDMSFP-UHFFFAOYSA-N 0.000 description 1
- 229940078583 calcium aluminosilicate Drugs 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- -1 that is Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/102—Glass compositions containing silica with 40% to 90% silica, by weight containing lead
- C03C3/108—Glass compositions containing silica with 40% to 90% silica, by weight containing lead containing boron
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Glass Compositions (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58176477A JPS6071540A (ja) | 1983-09-26 | 1983-09-26 | 基板用ガラス |
| US06/561,750 US4501819A (en) | 1982-12-23 | 1983-12-15 | Glass for a photomask |
| GB08333560A GB2134100A (en) | 1982-12-23 | 1983-12-16 | Glass for a photomask |
| DE3345943A DE3345943C2 (de) | 1982-12-23 | 1983-12-20 | Verwendung eines im wesentlichen SiO↓2↓, B↓2↓O↓3↓, Al↓2↓O↓3↓, MgO und PbO enthaltenden Glases für eine Photomaske und ein zusätzlich BaO und ZnO enthaltendes Glas dieses Systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58176477A JPS6071540A (ja) | 1983-09-26 | 1983-09-26 | 基板用ガラス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071540A true JPS6071540A (ja) | 1985-04-23 |
| JPH04936B2 JPH04936B2 (enrdf_load_stackoverflow) | 1992-01-09 |
Family
ID=16014351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58176477A Granted JPS6071540A (ja) | 1982-12-23 | 1983-09-26 | 基板用ガラス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071540A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622259A (ja) * | 1985-06-27 | 1987-01-08 | Hoya Corp | フオトマスクブランクとフオトマスク |
| EP0714862A1 (en) | 1994-11-30 | 1996-06-05 | Asahi Glass Company Ltd. | Alkali-free glass and flat panel display |
| JP2016074575A (ja) * | 2014-10-08 | 2016-05-12 | 株式会社オハラ | ガラス |
| JP2019011244A (ja) * | 2017-06-29 | 2019-01-24 | 日本板硝子株式会社 | ガラス組成物及びこれを用いたガラス製品 |
-
1983
- 1983-09-26 JP JP58176477A patent/JPS6071540A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622259A (ja) * | 1985-06-27 | 1987-01-08 | Hoya Corp | フオトマスクブランクとフオトマスク |
| EP0714862A1 (en) | 1994-11-30 | 1996-06-05 | Asahi Glass Company Ltd. | Alkali-free glass and flat panel display |
| JP2016074575A (ja) * | 2014-10-08 | 2016-05-12 | 株式会社オハラ | ガラス |
| JP2019011244A (ja) * | 2017-06-29 | 2019-01-24 | 日本板硝子株式会社 | ガラス組成物及びこれを用いたガラス製品 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04936B2 (enrdf_load_stackoverflow) | 1992-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4994415A (en) | SiO2 -Al2 O3 -BaO glass substrates with improved chemical resistance for use in display panels and others having thin films | |
| JP2871163B2 (ja) | 無アルカリガラス | |
| US4640900A (en) | Low expansion glass | |
| WO1997011920A1 (fr) | Substrat de verre exempt d'alcalis | |
| JP3666054B2 (ja) | 基板用ガラス | |
| JP3800443B2 (ja) | ディスプレイ用無アルカリガラス基板及びその製造方法 | |
| JPH08295530A (ja) | 無アルカリガラス基板 | |
| US4687750A (en) | Transparent glass-ceramics containing gahnite | |
| JPH03164445A (ja) | 透明結晶化ガラス | |
| JPH1025132A (ja) | 無アルカリガラス及びその製造方法 | |
| US2527693A (en) | Soft glass having wide working range | |
| US4501819A (en) | Glass for a photomask | |
| JPH10114538A (ja) | 無アルカリガラス及びその製造方法 | |
| EP0048120B1 (en) | Glass envelopes for tungsten-halogen lamps and production thereof | |
| JPS61236631A (ja) | 耐火・耐熱性ガラス | |
| WO2023022074A1 (ja) | 宇宙太陽光発電用ガラス基板 | |
| JPS61261232A (ja) | 耐火・耐熱性ガラス | |
| JP2000128572A (ja) | 硼珪酸ガラス及びその製造方法 | |
| JPH01208343A (ja) | 透明結晶化ガラス | |
| JP3460298B2 (ja) | 基板用ガラス組成物 | |
| JPS6071540A (ja) | 基板用ガラス | |
| JPS61295256A (ja) | 基板用ガラス | |
| US4385128A (en) | Germanium-containing glass of high infrared transmission and low density | |
| JPS6287432A (ja) | 光学ガラス | |
| JPH0446908B2 (enrdf_load_stackoverflow) |