JPS6070721A - ラテラルエピタキシャル成長方法 - Google Patents

ラテラルエピタキシャル成長方法

Info

Publication number
JPS6070721A
JPS6070721A JP58176902A JP17690283A JPS6070721A JP S6070721 A JPS6070721 A JP S6070721A JP 58176902 A JP58176902 A JP 58176902A JP 17690283 A JP17690283 A JP 17690283A JP S6070721 A JPS6070721 A JP S6070721A
Authority
JP
Japan
Prior art keywords
sio2
regions
single crystal
region
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58176902A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377654B2 (cg-RX-API-DMAC10.html
Inventor
Junji Sakurai
桜井　潤治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58176902A priority Critical patent/JPS6070721A/ja
Publication of JPS6070721A publication Critical patent/JPS6070721A/ja
Publication of JPH0377654B2 publication Critical patent/JPH0377654B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/3802—
    • H10P14/3814—
    • H10P14/2905—
    • H10P14/3238—
    • H10P14/3244—
    • H10P14/3411—
    • H10P14/3458—
    • H10P14/382—

Landscapes

  • Recrystallisation Techniques (AREA)
JP58176902A 1983-09-27 1983-09-27 ラテラルエピタキシャル成長方法 Granted JPS6070721A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58176902A JPS6070721A (ja) 1983-09-27 1983-09-27 ラテラルエピタキシャル成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58176902A JPS6070721A (ja) 1983-09-27 1983-09-27 ラテラルエピタキシャル成長方法

Publications (2)

Publication Number Publication Date
JPS6070721A true JPS6070721A (ja) 1985-04-22
JPH0377654B2 JPH0377654B2 (cg-RX-API-DMAC10.html) 1991-12-11

Family

ID=16021749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58176902A Granted JPS6070721A (ja) 1983-09-27 1983-09-27 ラテラルエピタキシャル成長方法

Country Status (1)

Country Link
JP (1) JPS6070721A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPH0377654B2 (cg-RX-API-DMAC10.html) 1991-12-11

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