JPS6066202A - レ−ザ用反射鏡 - Google Patents

レ−ザ用反射鏡

Info

Publication number
JPS6066202A
JPS6066202A JP17489983A JP17489983A JPS6066202A JP S6066202 A JPS6066202 A JP S6066202A JP 17489983 A JP17489983 A JP 17489983A JP 17489983 A JP17489983 A JP 17489983A JP S6066202 A JPS6066202 A JP S6066202A
Authority
JP
Japan
Prior art keywords
laser
layer
silicon
surface layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17489983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336402B2 (enExample
Inventor
Saburo Tabata
田畑　三郎
Hideo Hayashi
英雄 林
Yoshiyuki Sato
義幸 佐藤
Tamiji Kuki
久木　民治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON HAKUMAKU KOGAKU KK
National Institute of Advanced Industrial Science and Technology
Original Assignee
NIPPON HAKUMAKU KOGAKU KK
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON HAKUMAKU KOGAKU KK, Agency of Industrial Science and Technology filed Critical NIPPON HAKUMAKU KOGAKU KK
Priority to JP17489983A priority Critical patent/JPS6066202A/ja
Publication of JPS6066202A publication Critical patent/JPS6066202A/ja
Publication of JPH0336402B2 publication Critical patent/JPH0336402B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Lasers (AREA)
JP17489983A 1983-09-20 1983-09-20 レ−ザ用反射鏡 Granted JPS6066202A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17489983A JPS6066202A (ja) 1983-09-20 1983-09-20 レ−ザ用反射鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17489983A JPS6066202A (ja) 1983-09-20 1983-09-20 レ−ザ用反射鏡

Publications (2)

Publication Number Publication Date
JPS6066202A true JPS6066202A (ja) 1985-04-16
JPH0336402B2 JPH0336402B2 (enExample) 1991-05-31

Family

ID=15986630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17489983A Granted JPS6066202A (ja) 1983-09-20 1983-09-20 レ−ザ用反射鏡

Country Status (1)

Country Link
JP (1) JPS6066202A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281203A (ja) * 1985-06-07 1986-12-11 Toshiba Corp 低散乱ミラ−及びその製造方法
JPS61295373A (ja) * 1985-06-25 1986-12-26 Canon Inc 光化学気相成長法による堆積膜の形成方法および装置
JPS62240903A (ja) * 1986-04-14 1987-10-21 Toshiba Glass Co Ltd 多層膜反射鏡
JPS63113507A (ja) * 1986-10-31 1988-05-18 Hitachi Ltd 光導波路およびその製造法
JPS63208801A (ja) * 1987-02-26 1988-08-30 Matsushita Electric Ind Co Ltd エキシマレ−ザ用ミラ−
JPH06140704A (ja) * 1992-10-26 1994-05-20 Mitsubishi Electric Corp レーザ光照射装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281203A (ja) * 1985-06-07 1986-12-11 Toshiba Corp 低散乱ミラ−及びその製造方法
JPS61295373A (ja) * 1985-06-25 1986-12-26 Canon Inc 光化学気相成長法による堆積膜の形成方法および装置
JPS62240903A (ja) * 1986-04-14 1987-10-21 Toshiba Glass Co Ltd 多層膜反射鏡
JPS63113507A (ja) * 1986-10-31 1988-05-18 Hitachi Ltd 光導波路およびその製造法
JPS63208801A (ja) * 1987-02-26 1988-08-30 Matsushita Electric Ind Co Ltd エキシマレ−ザ用ミラ−
JPH06140704A (ja) * 1992-10-26 1994-05-20 Mitsubishi Electric Corp レーザ光照射装置

Also Published As

Publication number Publication date
JPH0336402B2 (enExample) 1991-05-31

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