JPS605537A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS605537A
JPS605537A JP59094203A JP9420384A JPS605537A JP S605537 A JPS605537 A JP S605537A JP 59094203 A JP59094203 A JP 59094203A JP 9420384 A JP9420384 A JP 9420384A JP S605537 A JPS605537 A JP S605537A
Authority
JP
Japan
Prior art keywords
monitoring
oxidized film
region
covered
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59094203A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310579B2 (enExample
Inventor
Kunio Aomura
青村　國男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP59094203A priority Critical patent/JPS605537A/ja
Publication of JPS605537A publication Critical patent/JPS605537A/ja
Publication of JPS6310579B2 publication Critical patent/JPS6310579B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59094203A 1984-05-11 1984-05-11 半導体装置の製造方法 Granted JPS605537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59094203A JPS605537A (ja) 1984-05-11 1984-05-11 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59094203A JPS605537A (ja) 1984-05-11 1984-05-11 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP50145473A Division JPS5268376A (en) 1975-12-05 1975-12-05 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS605537A true JPS605537A (ja) 1985-01-12
JPS6310579B2 JPS6310579B2 (enExample) 1988-03-08

Family

ID=14103741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59094203A Granted JPS605537A (ja) 1984-05-11 1984-05-11 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS605537A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63220537A (ja) * 1987-03-09 1988-09-13 Nec Corp 半導体基板
US4992850A (en) * 1989-02-15 1991-02-12 Micron Technology, Inc. Directly bonded simm module
US4992849A (en) * 1989-02-15 1991-02-12 Micron Technology, Inc. Directly bonded board multiple integrated circuit module
US4992767A (en) * 1989-02-03 1991-02-12 Hitachi Metals, Ltd. Magnet roll
US5236857A (en) * 1991-10-30 1993-08-17 Texas Instruments Incorporated Resistor structure and process
USRE36325E (en) * 1988-09-30 1999-10-05 Micron Technology, Inc. Directly bonded SIMM module

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492485A (enExample) * 1972-04-19 1974-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492485A (enExample) * 1972-04-19 1974-01-10

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63220537A (ja) * 1987-03-09 1988-09-13 Nec Corp 半導体基板
USRE36325E (en) * 1988-09-30 1999-10-05 Micron Technology, Inc. Directly bonded SIMM module
US4992767A (en) * 1989-02-03 1991-02-12 Hitachi Metals, Ltd. Magnet roll
US4992850A (en) * 1989-02-15 1991-02-12 Micron Technology, Inc. Directly bonded simm module
US4992849A (en) * 1989-02-15 1991-02-12 Micron Technology, Inc. Directly bonded board multiple integrated circuit module
US5236857A (en) * 1991-10-30 1993-08-17 Texas Instruments Incorporated Resistor structure and process
US5465005A (en) * 1991-10-30 1995-11-07 Texas Instruments Incorporated Polysilicon resistor structure including polysilicon contacts
US6261915B1 (en) 1991-10-30 2001-07-17 Texas Instruments Incorporated Process of making polysilicon resistor

Also Published As

Publication number Publication date
JPS6310579B2 (enExample) 1988-03-08

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