JPS6052930A - 垂直磁気記録媒体の製造方法 - Google Patents
垂直磁気記録媒体の製造方法Info
- Publication number
- JPS6052930A JPS6052930A JP16051283A JP16051283A JPS6052930A JP S6052930 A JPS6052930 A JP S6052930A JP 16051283 A JP16051283 A JP 16051283A JP 16051283 A JP16051283 A JP 16051283A JP S6052930 A JPS6052930 A JP S6052930A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- substrate
- soft magnetic
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 34
- 239000000956 alloy Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims description 47
- LLLVZDVNHNWSDS-UHFFFAOYSA-N 4-methylidene-3,5-dioxabicyclo[5.2.2]undeca-1(9),7,10-triene-2,6-dione Chemical group C1(C2=CC=C(C(=O)OC(=C)O1)C=C2)=O LLLVZDVNHNWSDS-UHFFFAOYSA-N 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims description 2
- UHPJWJRERDJHOJ-UHFFFAOYSA-N ethene;naphthalene-1-carboxylic acid Chemical compound C=C.C1=CC=C2C(C(=O)O)=CC=CC2=C1 UHPJWJRERDJHOJ-UHFFFAOYSA-N 0.000 claims description 2
- 229920000728 polyester Polymers 0.000 claims description 2
- 229920005570 flexible polymer Polymers 0.000 claims 1
- 229910000684 Cobalt-chrome Inorganic materials 0.000 abstract description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 4
- 239000010952 cobalt-chrome Substances 0.000 abstract description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 4
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 4
- 230000007423 decrease Effects 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 3
- -1 polyethylene terephthalate Polymers 0.000 abstract description 3
- 238000007788 roughening Methods 0.000 abstract description 2
- 229920000642 polymer Polymers 0.000 abstract 2
- 229910000531 Co alloy Inorganic materials 0.000 abstract 1
- 229910001004 magnetic alloy Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 65
- 239000010408 film Substances 0.000 description 44
- 238000004544 sputter deposition Methods 0.000 description 15
- 239000010409 thin film Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 229920000620 organic polymer Polymers 0.000 description 7
- 238000001556 precipitation Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229910001020 Au alloy Inorganic materials 0.000 description 3
- 239000003353 gold alloy Substances 0.000 description 3
- 229910001182 Mo alloy Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229920000307 polymer substrate Polymers 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 101100387915 Caenorhabditis elegans dop-4 gene Proteins 0.000 description 1
- 102100023344 Centromere protein F Human genes 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 101000907941 Homo sapiens Centromere protein F Proteins 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000009998 heat setting Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920003055 poly(ester-imide) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16051283A JPS6052930A (ja) | 1983-09-02 | 1983-09-02 | 垂直磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16051283A JPS6052930A (ja) | 1983-09-02 | 1983-09-02 | 垂直磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6052930A true JPS6052930A (ja) | 1985-03-26 |
| JPH0320816B2 JPH0320816B2 (enrdf_load_stackoverflow) | 1991-03-20 |
Family
ID=15716546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16051283A Granted JPS6052930A (ja) | 1983-09-02 | 1983-09-02 | 垂直磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6052930A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6326828A (ja) * | 1986-07-18 | 1988-02-04 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
| JPS63197027A (ja) * | 1987-02-12 | 1988-08-15 | Tdk Corp | 垂直磁気記録媒体の製造方法及び製造装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5724022A (en) * | 1980-07-16 | 1982-02-08 | Toshiba Corp | Production of magnetic recording substance |
| JPS5730118A (en) * | 1980-07-30 | 1982-02-18 | Matsushita Electric Ind Co Ltd | Vertically magnetized medium and its manufacture |
| JPS57127929A (en) * | 1981-01-29 | 1982-08-09 | Matsushita Electric Ind Co Ltd | Manufacture for magnetic recording medium |
| JPS5891A (ja) * | 1981-06-25 | 1983-01-05 | Hitachi Plant Eng & Constr Co Ltd | 熱交換装置 |
-
1983
- 1983-09-02 JP JP16051283A patent/JPS6052930A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5724022A (en) * | 1980-07-16 | 1982-02-08 | Toshiba Corp | Production of magnetic recording substance |
| JPS5730118A (en) * | 1980-07-30 | 1982-02-18 | Matsushita Electric Ind Co Ltd | Vertically magnetized medium and its manufacture |
| JPS57127929A (en) * | 1981-01-29 | 1982-08-09 | Matsushita Electric Ind Co Ltd | Manufacture for magnetic recording medium |
| JPS5891A (ja) * | 1981-06-25 | 1983-01-05 | Hitachi Plant Eng & Constr Co Ltd | 熱交換装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6326828A (ja) * | 1986-07-18 | 1988-02-04 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
| JPS63197027A (ja) * | 1987-02-12 | 1988-08-15 | Tdk Corp | 垂直磁気記録媒体の製造方法及び製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0320816B2 (enrdf_load_stackoverflow) | 1991-03-20 |
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