JPS6044A - 二次イオン化質量分析装置 - Google Patents

二次イオン化質量分析装置

Info

Publication number
JPS6044A
JPS6044A JP58106797A JP10679783A JPS6044A JP S6044 A JPS6044 A JP S6044A JP 58106797 A JP58106797 A JP 58106797A JP 10679783 A JP10679783 A JP 10679783A JP S6044 A JPS6044 A JP S6044A
Authority
JP
Japan
Prior art keywords
sample
mass spectrometer
chamber
ionization chamber
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58106797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556619B2 (enrdf_load_stackoverflow
Inventor
Minoru Sakairi
実 坂入
Hideki Kanbara
秀記 神原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58106797A priority Critical patent/JPS6044A/ja
Priority to GB08415193A priority patent/GB2143673B/en
Publication of JPS6044A publication Critical patent/JPS6044A/ja
Publication of JPH0556619B2 publication Critical patent/JPH0556619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58106797A 1983-06-16 1983-06-16 二次イオン化質量分析装置 Granted JPS6044A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58106797A JPS6044A (ja) 1983-06-16 1983-06-16 二次イオン化質量分析装置
GB08415193A GB2143673B (en) 1983-06-16 1984-06-14 Ionizing samples for secondary ion mass spectrometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58106797A JPS6044A (ja) 1983-06-16 1983-06-16 二次イオン化質量分析装置

Publications (2)

Publication Number Publication Date
JPS6044A true JPS6044A (ja) 1985-01-05
JPH0556619B2 JPH0556619B2 (enrdf_load_stackoverflow) 1993-08-20

Family

ID=14442872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58106797A Granted JPS6044A (ja) 1983-06-16 1983-06-16 二次イオン化質量分析装置

Country Status (2)

Country Link
JP (1) JPS6044A (enrdf_load_stackoverflow)
GB (1) GB2143673B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63252244A (ja) * 1987-03-06 1988-10-19 ウオーターズ・インヴエストメンツ・リミテツド 流出液を質量分光光度計およびその他の気相もしくは粒子の検出器に導入するための方法および装置
US5340267A (en) * 1991-12-17 1994-08-23 Overhead Door Corporation Retractable vehicle ramp with lift assist

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313249A (ja) * 1986-07-04 1988-01-20 Hitachi Ltd 質量分析装置
EP0383301B1 (en) * 1989-02-15 1999-09-15 Hitachi, Ltd. Method and apparatus for forming a film
FR2685086A1 (fr) * 1991-12-17 1993-06-18 Devienne Marcel Procede d'observation sequentielle des etats successifs d'une reaction chimique.
DE19934242A1 (de) * 1999-07-21 2001-01-25 Clariant Gmbh Verfahren zum Nachweis von organischen Verbindungen auf Oberflächen beim Menschen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6611941A (enrdf_load_stackoverflow) * 1966-08-25 1968-02-26
GB1246709A (en) * 1969-04-30 1971-09-15 Ass Elect Ind Improvements in or relating to mass spectrometry
BE758925A (fr) * 1969-11-14 1971-04-16 Bayer Ag Procede pour l'analyse des surfaces de corps solides par spectrometrie de masse
GB1371104A (en) * 1972-03-20 1974-10-23 Applied Research Lab Ltd Methods of and apparatus for analysing mixtures
FR2212044A5 (enrdf_load_stackoverflow) * 1972-12-22 1974-07-19 Anvar
DE2837799A1 (de) * 1978-08-30 1980-03-13 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zur analyse von aus einem chromatographen austretenden fluiden
EP0052140A1 (en) * 1980-05-23 1982-05-26 Research Corporation Ion vapor source for mass spectrometry of liquids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63252244A (ja) * 1987-03-06 1988-10-19 ウオーターズ・インヴエストメンツ・リミテツド 流出液を質量分光光度計およびその他の気相もしくは粒子の検出器に導入するための方法および装置
US5340267A (en) * 1991-12-17 1994-08-23 Overhead Door Corporation Retractable vehicle ramp with lift assist

Also Published As

Publication number Publication date
GB2143673A (en) 1985-02-13
GB8415193D0 (en) 1984-07-18
GB2143673B (en) 1987-11-11
JPH0556619B2 (enrdf_load_stackoverflow) 1993-08-20

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