JPS6044A - Secondary ionized mass spectrometer - Google Patents
Secondary ionized mass spectrometerInfo
- Publication number
- JPS6044A JPS6044A JP58106797A JP10679783A JPS6044A JP S6044 A JPS6044 A JP S6044A JP 58106797 A JP58106797 A JP 58106797A JP 10679783 A JP10679783 A JP 10679783A JP S6044 A JPS6044 A JP S6044A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- mass spectrometer
- chamber
- molecular
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims abstract description 43
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000012488 sample solution Substances 0.000 claims abstract description 15
- 239000002904 solvent Substances 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 8
- 238000004949 mass spectrometry Methods 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 3
- 239000005416 organic matter Substances 0.000 claims description 2
- 239000011164 primary particle Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 238000010884 ion-beam technique Methods 0.000 abstract description 8
- 241000238634 Libellulidae Species 0.000 abstract description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000005507 spraying Methods 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 13
- 239000000126 substance Substances 0.000 description 7
- 238000004811 liquid chromatography Methods 0.000 description 6
- 238000005086 pumping Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004780 2D liquid chromatography Methods 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000000451 chemical ionisation Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- OSUHJPCHFDQAIT-UHFFFAOYSA-N ethyl 2-{4-[(6-chloroquinoxalin-2-yl)oxy]phenoxy}propanoate Chemical compound C1=CC(OC(C)C(=O)OCC)=CC=C1OC1=CN=C(C=C(Cl)C=C2)C2=N1 OSUHJPCHFDQAIT-UHFFFAOYSA-N 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000004895 liquid chromatography mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、二次イオン化質量分析装置に係シ、特に、溶
液中の不揮発性化合物をイオン化するのに好適な試料導
入装置を備えた二次イオン化質量分析装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a secondary ionization mass spectrometer, and particularly to a secondary ionization mass spectrometer equipped with a sample introduction device suitable for ionizing nonvolatile compounds in a solution. It relates to an ionization mass spectrometer.
近年、ライフサイエンスの進歩は著るしいが、この分野
では、生体に関連した不揮発性で、熱的に不安定な物質
の分離分析が基盤技術として必要不可欠である。液体ク
ロマトグラフ（ＬＣ）は、このような物質の分離装置と
して広く使用されているが、検出感度、同定能力の点で
ニーズを満足させていない。そこで、高感度で、同定能
力にも優れた質量分析計（ＭＳ）とＬＣとの結合が、こ
こ十数年世界各地で検討されてきたが、溶液を気相でイ
オン化しなければならないことに関する種々の技術的課
題があるため、未だ成功していないのが実状である。In recent years, life science has made remarkable progress, and in this field, separation and analysis of nonvolatile, thermally unstable substances related to living organisms is essential as a basic technology. Although liquid chromatography (LC) is widely used as a separation device for such substances, it does not satisfy needs in terms of detection sensitivity and identification ability. Therefore, the coupling of mass spectrometers (MS), which have high sensitivity and excellent identification ability, with LC has been studied in various parts of the world for the past ten years. The reality is that it has not yet been successful due to various technical issues.
この液体クロマトグラフ／質量分析計結合装置（ＬＣ／
ＭＳ）におけるイオン化法としては、大気圧イオン化、
化学イオン化などいろいろ考えられているが、金属板上
に塗布した試料に一次イオンを照射して、二次イオンを
をり出して分析する二次イオン化質量分析法（ＳＩＭＳ
法）もその一つである。従来のＳＩＭＳ法を用いたＬＣ
／ＭＳインクフェイスでは、複数段の差動排気を用いて
、銀ベルト上に噴霧塗布した試料をベルトを回転するこ
とによって、大気圧から１Ｑ Ｔｏｒｒ 〜ｉ Ｑ Ｔ
ｏｒｒの高真空に保たれたイオン化室に導入して、その
イオン化室内で一次イオンを試別に照射し、生成した二
次イオンを質量分析しようというものであった（例えば
、Ｏｒｇ、 Ｍａｓｓ Ｓｐｅｃｔｒｏｍ、 、 ｉ５
。This liquid chromatograph/mass spectrometer combination device (LC/
Ionization methods in MS) include atmospheric pressure ionization,
Various methods such as chemical ionization are being considered, but secondary ionization mass spectrometry (SIMS) is a method in which a sample coated on a metal plate is irradiated with primary ions, and secondary ions are extracted and analyzed.
law) is one of them. LC using conventional SIMS method
/MS Inkface uses multiple stages of differential pumping to spray a sample onto a silver belt and rotate the belt, thereby increasing the pressure from atmospheric pressure to 1Q Torr ~ i Q T
The idea was to introduce the ionization chamber into an ionization chamber maintained at a high vacuum in the ORR, irradiate it with primary ions in the ionization chamber, and perform mass spectrometry on the generated secondary ions (for example, ORG, Mass Spectrom, i5
.
４５９、１９８０ ）。しかし、この方法では、銀ベル
ト上への試別の塗布がう甘く行かないこと、差動排気部
各段間に用いる前記ベルトを通すだめのスリットは間隙
が３００μｍｎ程度と狭いため、銀ベルトに塗布された
試料がスリット部を汚して、後からきた他成分と混合し
てし甘う可能性があること、質量分析を終った試料を銀
ベルトから取り去ることが難かしいため、履歴の問題が
あること、そして銀ベルトに試料を噴霧塗布するとき、
塗布領域がひろがってし甘うこと、などの問題があった
。459, 1980). However, with this method, the trial coating on the silver belt is not easy, and the slit for passing the belt used between each stage of the differential exhaust section has a narrow gap of about 300 μm. There is a possibility that the applied sample may contaminate the slit and mix with other components that came later, and it is difficult to remove the sample from the silver belt after mass spectrometry, so there are problems with history. When spraying the sample onto the silver belt,
There were problems such as the application area being spread out.
また、生体に関連した物質には、溶媒中でのみ安定に存
在し、この溶媒を除去し、その−１１放置しておくと分
解してしまうものが存在する。このような試料をＳＩＭ
Ｓ法で分析しようとすると、金属板に塗布した際に試料
が分解し、測定できなくなるという難点があった。In addition, some substances related to living organisms exist stably only in a solvent and decompose if the solvent is removed and the substance is left to stand. SIM such a sample
When attempting to analyze using the S method, there was a problem in that the sample decomposed when applied to a metal plate, making measurement impossible.
本発明の目的は、ＳＩＭＳ法を用いた新しい型のＬＣ／
ＭＳインターフェイスを提供するとともに、ＳＩＭＳ法
を用いて、溶媒中でのみ安定に存在する物質を質量分析
することを可能にする装置を提供することにある。The purpose of the present invention is to develop a new type of LC/LC using SIMS method.
The object of the present invention is to provide an apparatus that not only provides an MS interface but also enables mass spectrometry of substances that stably exist only in a solvent using the SIMS method.
本発明は、上記の目的を達成するために、溶媒中に溶解
した試別を霧化器などによって霧化して細孔から噴出さ
せたり、ノズルから加圧によりジェット噴出させたりし
て分子線状にして差動排気しているスキマー等の細孔部
を通して１０ 〜１０Ｔｏｒｒ の高真空室内に導入し
て該室内に設けた金属板に衝突させ、この板面上に試料
溶液を１４着させると同時に該試料付着領域に不活性ガ
スイオン、中性粒子等の粒子ビームを照射して、前試料
からの二次イオンを取り出して、これを質量分析部に導
き、質量分析を行なうようにしだものである。In order to achieve the above-mentioned object, the present invention atomizes a sample dissolved in a solvent using an atomizer or the like and jets it out from pores, or jets it out from a nozzle under pressure. The sample solution is introduced into a high vacuum chamber of 10 to 10 Torr through the pores of a skimmer or the like that is differentially pumped, and collided with a metal plate installed in the chamber, and at the same time, the sample solution is deposited on the plate surface. The sample attachment area is irradiated with a particle beam of inert gas ions, neutral particles, etc., and secondary ions from the previous sample are extracted and guided to the mass spectrometer for mass spectrometry. be.
〔発明の実施例〕 以下、本発明を実施例により詳細に説明する。[Embodiments of the invention] Hereinafter, the present invention will be explained in detail with reference to Examples.
第１図は本発明の二次イオン化質量分析装置の概略説明
図である。液体クロマトグラフ装置１で順次分離されて
出て来る溶媒に溶かした試料溶液を、例えば直径１０μ
ｍのノズルをもった霧化器２を通して分子線状試料６と
して噴出させろ。この霧化器には、超音波振動子を用い
て試料溶液なノズルから噴霧させるもの、試料溶液を加
圧してノズルから噴霧させるものなどを用いることがで
きる。霧化器２な出た分子線状状ｆ＝４３は一個あるい
は複数個の加熱されたスキマー４を通って、１「５〜１
０’Ｔｏ＋−ｒ台の高真空に保たれたイオン化室５内に
導かれ、イオン化室５内に設けられた金属ターゲノｌ−
（例えば鋼板製）乙に衝突する。霧化器２とイオン化室
５の間に設けたスキマー（図では２個）の部分を排気速
度２５Ｔ、／ｓｅｃの油回転ポンプと排気速度１００Ｌ
／Ｓｅｃの油拡散ポンプならびに前記の油回転ポンプと
排気速度６００Ｌ／ｓｅｃの油拡散ポンプにより、途中
に液体窒素トラップを設けて、矢印７の方向に２段に差
動排気した（これらの排気系は図示されていない）。FIG. 1 is a schematic explanatory diagram of a secondary ionization mass spectrometer of the present invention. The sample solution dissolved in the solvent that is sequentially separated in the liquid chromatograph device 1 is separated into a sample solution with a diameter of 10 μm, for example.
Spray it as a molecular beam sample 6 through an atomizer 2 having a nozzle of m. This atomizer may be one that uses an ultrasonic vibrator to spray the sample solution from a nozzle, or one that sprays the sample solution under pressure from a nozzle. The molecular linear form f=43 emitted from the atomizer 2 passes through one or more heated skimmers 4, and passes through one or more heated skimmers 4 to
A metal target l- provided in the ionization chamber 5 is guided into the ionization chamber 5 maintained at a high vacuum on the order of 0'To+-r.
(for example, made of steel plate) collides with B. The skimmer (two in the figure) installed between the atomizer 2 and the ionization chamber 5 is pumped with an oil rotary pump with a pumping speed of 25T/sec and a pumping speed of 100L.
/Sec oil diffusion pump and the aforementioned oil rotary pump and oil diffusion pump with a pumping speed of 600 L/sec, a liquid nitrogen trap was installed midway, and differential pumping was carried out in two stages in the direction of arrow 7. (not shown).
イオン化室５に導入され、金属ターゲット乙に分子線状
試料ろの状態で衝突した試料の大部分はターゲット乙の
表面に付着する。ターゲット６の試料付着面部分に、前
記分子線状試料６とは反対側から、ターゲット乙の面と
２０程度の傾きをもった、電流密度１０ Ａ／ｃｍ２あ
るいはそれ以上の６
キセノンガス等の不活性ガスの一次イオンビーム７を照
射する。８はこのイオンビ・−ム７の発生源である。こ
こで、−次イオンビーム７のターゲット６への照射角を
約２０°としたのは、試料である有機物を効率よく、二
次イオン流９として取り出すためである。なお、イオン
ビームの代りに高速中性粒子ビームを用いてもよい。Most of the sample introduced into the ionization chamber 5 and collided with the metal target B in the form of a molecular wire sample filter adheres to the surface of the target B. An impurity such as xenon gas having a current density of 10 A/cm2 or more is applied to the sample attachment surface of the target 6 from the side opposite to the molecular wire sample 6 at an angle of about 20° with respect to the surface of the target A. A primary ion beam 7 of active gas is irradiated. 8 is the source of this ion beam 7. Here, the reason why the irradiation angle of the -order ion beam 7 to the target 6 is set to about 20 degrees is to efficiently extract the organic matter that is the sample as the secondary ion flow 9. Note that a high-speed neutral particle beam may be used instead of the ion beam.
一次イオンビーム７を高速でターゲット６を構成してい
る固体内に打込むと、入射イオンはその運動エネルギー
の一部を固体を構成している原子に与える。運動エネル
ギーを得た原子は次々に衝突を起こし、やがてこの衝突
カスケードは表面に到達し、表面近傍の原子を外部には
じき出す。銀はこの効率、すなわち、スパッタ効率が良
いため、試料付着用ターゲット乙の材質に適している。When the primary ion beam 7 is implanted at high speed into the solid that constitutes the target 6, the incident ions impart part of their kinetic energy to the atoms that constitute the solid. Atoms that have gained kinetic energy collide one after another, and eventually this cascade of collisions reaches the surface and ejects atoms near the surface to the outside. Since silver has a good sputtering efficiency, it is suitable as a material for the sample attachment target B.
以上のようにして、ターゲット６を構成している原子が
はじき出されるときに、ターゲット表面に有機物試料が
付着していると、はじき出される上記原子は有機物試料
と衝突してその運動エネルギーを有機物試料に移して、
有機物試料をターゲット６０表面から離脱、イオン化さ
せ二次イオン流９として取シ出される。この二次イオン
流９を、図示され、てはいないが、イオン化室５に接続
された質量分析部に導き、分析を行なう。As described above, when the atoms constituting the target 6 are ejected, if an organic sample is attached to the target surface, the ejected atoms collide with the organic sample and transfer their kinetic energy to the organic sample. Move it,
The organic sample is separated from the surface of the target 60, ionized, and taken out as a secondary ion stream 9. This secondary ion flow 9 is guided to a mass spectrometer connected to the ionization chamber 5 and analyzed, although not shown.
このようにして、本実施例の装置によれば、溶媒中の有
機物試料等をＳＩＭＳ法を用いて分離測定することが可
能となり、特に溶媒中でしか安定に存在しない物質の分
析にも適用できることが確認された。寸だ、−次イオン
電流を大きくすることにより、ターゲットに利殖してく
る試料のほとんどすべてをスパッタにより完全に除去し
、履歴を少なくすることができることがわかった。In this way, according to the apparatus of this example, it is possible to separate and measure organic samples in a solvent using the SIMS method, and in particular, it can be applied to the analysis of substances that exist stably only in a solvent. was confirmed. It has been found that by increasing the secondary ion current, almost all of the sample that has grown on the target can be completely removed by sputtering, and the history can be reduced.
第２図は本発明の他の実施例の概略説明図である。本実
施例は、第１図に示した装置においてイオン化室５内に
設けた板状ターゲット６をベルト状り−ゲノ） １０に
置きかえたものである。１１はベルト状ターゲット１０
の加熱装置である。このようにすれば、ターゲット１０
のイオン衝撃される部分が高真空のイオン化室内５で移
動し、常に新しいターゲツト面に試料がジェット塗布さ
れてイオン照射されるようになり、ターゲツト面の汚染
による履歴を与り小さくすることができる。FIG. 2 is a schematic explanatory diagram of another embodiment of the present invention. In this embodiment, the plate-shaped target 6 provided in the ionization chamber 5 in the apparatus shown in FIG. 1 is replaced with a belt-shaped target 10. 11 is a belt-shaped target 10
This is a heating device. In this way, target 10
The part that is bombarded with ions moves in the high-vacuum ionization chamber 5, and the sample is constantly jet-coated and ion-irradiated onto a new target surface, making it possible to reduce the history of contamination on the target surface. .
本発明によれば、溶媒中の試料をＳ １． Ｍ Ｓ法を
用いで測定することが可能となり、ＬＣ／ＭＳのインタ
ーフェイスとして使用できる。さらに、溶媒中でしか安
定に存在しない物質についても、この手法が適用できる
ことが確認された。According to the invention, a sample in a solvent is transferred to S 1. It becomes possible to measure using the MS method and can be used as an LC/MS interface. Furthermore, it was confirmed that this method can be applied to substances that exist stably only in solvents.
第１図及び第２図は、それぞれ本発明の実施例の概略説
明図である。
図において、
１・・液体クロマトグラフ装置
２・・・霧化器 ろ ・分子線状試料
４・・・スキマー ５ ・イオン化室
６・・・金属ターゲット ７・−次イオンヒーム８・・
イオンビーム発生源
９・・・二次イオン １ｏ・・ヘルド状ターヶ何１１・
・・加熱装置
代理人弁理士 中村純之助1 and 2 are schematic illustrations of embodiments of the present invention, respectively. In the figure, 1.Liquid chromatography device 2.Atomizer filtration.Molecular linear sample 4.Skimmer 5.Ionization chamber 6.Metal target 7.-Next ion beam 8.
Ion beam source 9...Secondary ions 1o...Heald-shaped targa 11.
...Heating device agent patent attorney Junnosuke Nakamura
Claims (1)
配置された試料イオン化室と、前記試料イオン化室の他
端側に該試料イオン化室と一体に構成された質量分析部
と、前記金属ターゲット表面の所定位置を斜め方向から
一次粒子線で照射しうるようにして前記試料イオン化室
の外壁の所定位置に取り付けられた粒子線発生部とを備
え、前記試料イオン化室、質量分析部及び粒子線発生部
内は少なくとも１０−５〜１Ｏ−６Ｔｏｒｒ範囲の高真
空に保持されており、さらに、前記金属ターゲット表面
の前記−次粒子線照射位置に斜め方向から溶媒に溶かさ
れた有機物試料溶液を分子線状にして前記試料イオン化
室外から該室内に該室内の真空度を低下させることなく
導入して衝突させうるようにして前記試料イオン化室の
外壁の所定位置に取り付けられた分子線状試料導入部と
、前記分子線状試料導入部入口側に接続され、前記溶媒
に溶かさ・れた有機物試料溶液を該導入部に送り込むだ
めの液体クロマトグラフ部とを備え、前記有機物試料溶
液を分子線状にして前記金属ターゲット表面に衝突、付
着させると同時に該試料溶液に前記粒子線を照射して該
有機物をイオン化して取り出し、前記質量分析部におい
て質量分析するようにしたことを特徴とする二次イオン
化質量分析装置。 （２、特許請求の範囲第１項記載の二次イオン化質量分
析装置において、前記金属ターゲノｌ−が銀で構成され
ていることを特徴とする二次イオン化質量分析装置。 （３）特許請求の範囲第１項又は第２項記載の二次イオ
ン化質量分析装置において、前記金属ターゲットが板状
又はベルト状ターゲソｉ・であることを特徴とする二次
イオン化質量分析装置。 （４）特許請求の範囲第１項、第２項又は第６項記載の
二次イオン化質量分析装置において、前記分子線状試料
導入部が前記液体クロマトグラフ部の出口と接続する試
料溶液導入口と試料溶液を分子線状に霧化噴射するノズ
ルを有する霧化器と該霧化器から噴射された前記分子線
状試料溶液の通路に細孔を有する少なくとも１個のスキ
マ一部を有し、該スキマ一部内は前記試別イオン化室内
の真空度を低下させない程度に排気されていることを特
徴とする二次イオン化質量分析装置。[Scope of Claims] (1) A sample ionization chamber in which a metal target for attaching a sample solution is disposed inside one end, and a mass spectrometer integrally configured with the sample ionization chamber at the other end of the sample ionization chamber. and a particle beam generating unit attached to a predetermined position on an outer wall of the sample ionization chamber so as to be able to irradiate a predetermined position on the surface of the metal target with a primary particle beam from an oblique direction, the sample ionization chamber; The interior of the mass spectrometry section and the particle beam generation section is maintained at a high vacuum in the range of at least 10-5 to 1O-6 Torr, and furthermore, a particle is dissolved in a solvent from an oblique direction at the irradiation position of the -order particle beam on the surface of the metal target. Molecules attached to a predetermined position on the outer wall of the sample ionization chamber so that the organic sample solution can be made into a molecular line and introduced into the chamber from outside the sample ionization chamber and collided with each other without reducing the degree of vacuum in the chamber. a linear sample introduction section; and a liquid chromatograph section connected to the inlet side of the molecular linear sample introduction section for feeding an organic sample solution dissolved in the solvent into the introduction section, is made into a molecular beam and collides with and adheres to the surface of the metal target, and at the same time, the sample solution is irradiated with the particle beam to ionize and extract the organic matter, which is subjected to mass spectrometry in the mass spectrometer. Secondary ionization mass spectrometer. (2. The secondary ionization mass spectrometer according to claim 1, characterized in that the metal target metal is made of silver. (3) The secondary ionization mass spectrometer according to claim 1) The secondary ionization mass spectrometer according to claim 1 or 2, wherein the metal target is a plate-shaped or belt-shaped target. (4) Claims In the secondary ionization mass spectrometer according to scope 1, 2, or 6, the molecular line sample introduction section connects the sample solution to the sample solution inlet connected to the outlet of the liquid chromatograph section with the molecular beam. an atomizer having a nozzle that sprays atomized water into a shape, and at least one gap portion having a pore in a passage for the molecular linear sample solution injected from the atomizer; A secondary ionization mass spectrometer characterized in that the sample ionization chamber is evacuated to an extent that the degree of vacuum within the chamber is not reduced.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58106797A JPS6044A (en) | 1983-06-16 | 1983-06-16 | Secondary ionized mass spectrometer |
| GB08415193A GB2143673B (en) | 1983-06-16 | 1984-06-14 | Ionizing samples for secondary ion mass spectrometry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58106797A JPS6044A (en) | 1983-06-16 | 1983-06-16 | Secondary ionized mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6044A true JPS6044A (en) | 1985-01-05 |
| JPH0556619B2 JPH0556619B2 (en) | 1993-08-20 |
Family
ID=14442872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58106797A Granted JPS6044A (en) | 1983-06-16 | 1983-06-16 | Secondary ionized mass spectrometer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6044A (en) |
| GB (1) | GB2143673B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63252244A (en) * | 1987-03-06 | 1988-10-19 | ウオーターズ・インヴエストメンツ・リミテツド | Method and device for introducing effluent to mass spectrophotometer and other gaseous phase or particle detector |
| US5340267A (en) * | 1991-12-17 | 1994-08-23 | Overhead Door Corporation | Retractable vehicle ramp with lift assist |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6313249A (en) * | 1986-07-04 | 1988-01-20 | Hitachi Ltd | Mass-spectrometer |
| DE69033286T2 (en) * | 1989-02-15 | 2000-05-25 | Hitachi, Ltd. | Method and device for forming a film |
| FR2685086A1 (en) * | 1991-12-17 | 1993-06-18 | Devienne Marcel | PROCESS FOR SEQUENTIAL OBSERVATION OF SUCCESSIVE STATES OF A CHEMICAL REACTION. |
| DE19934242A1 (en) * | 1999-07-21 | 2001-01-25 | Clariant Gmbh | Method for the detection of organic compounds on surfaces in humans |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6611941A (en) * | 1966-08-25 | 1968-02-26 | ||
| GB1246709A (en) * | 1969-04-30 | 1971-09-15 | Ass Elect Ind | Improvements in or relating to mass spectrometry |
| BE758925A (en) * | 1969-11-14 | 1971-04-16 | Bayer Ag | METHOD FOR THE ANALYSIS OF SOLID BODY SURFACES BY MASS SPECTROMETRY |
| GB1371104A (en) * | 1972-03-20 | 1974-10-23 | Applied Research Lab Ltd | Methods of and apparatus for analysing mixtures |
| FR2212044A5 (en) * | 1972-12-22 | 1974-07-19 | Anvar | |
| DE2837799A1 (en) * | 1978-08-30 | 1980-03-13 | Leybold Heraeus Gmbh & Co Kg | METHOD AND DEVICE FOR ANALYZING FLUIDS LEAVING A CHROMATOGRAPH |
| WO1981003394A1 (en) * | 1980-05-23 | 1981-11-26 | Research Corp | Ion vapor source for mass spectrometry of liquids |
-
1983
- 1983-06-16 JP JP58106797A patent/JPS6044A/en active Granted
-
1984
- 1984-06-14 GB GB08415193A patent/GB2143673B/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63252244A (en) * | 1987-03-06 | 1988-10-19 | ウオーターズ・インヴエストメンツ・リミテツド | Method and device for introducing effluent to mass spectrophotometer and other gaseous phase or particle detector |
| US5340267A (en) * | 1991-12-17 | 1994-08-23 | Overhead Door Corporation | Retractable vehicle ramp with lift assist |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2143673A (en) | 1985-02-13 |
| JPH0556619B2 (en) | 1993-08-20 |
| GB8415193D0 (en) | 1984-07-18 |
| GB2143673B (en) | 1987-11-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7723678B2 (en) | Method and apparatus for surface desorption ionization by charged particles | |
| US7038217B2 (en) | Method and apparatus for generation of molecular beam | |
| US8704170B2 (en) | Method and apparatus for generating and analyzing ions | |
| JP3057607B2 (en) | Preparation method of mass spectrometry sample by desorption from frozen solution | |
| Tang et al. | Physical/chemical separations in the break-up of highly charged droplets from electrosprays | |
| JP3993895B2 (en) | Mass spectrometer and ion transport analysis method | |
| Murray et al. | Liquid sample introduction for matrix-assisted laser desorption ionization | |
| EP0161744B1 (en) | Mass spectrometer | |
| JPH07507418A (en) | Mass Analyzer Atmospheric Pressure Ion Interface | |
| Murray et al. | Aerosol matrix-assisted laser desorption ionization mass spectrometry | |
| US6541767B1 (en) | Atmospheric pressure ionization mass spectrometer with nonvolatile salt washing means | |
| JPH0854372A (en) | Device for converting solute sample into ionized molecule | |
| US7365315B2 (en) | Method and apparatus for ionization via interaction with metastable species | |
| JPH05217545A (en) | Atmosphetic pressure ionization mass spectrometer | |
| JP2002056802A (en) | Mass spectrometer | |
| JP7018416B2 (en) | Impactor spray ion source | |
| US5825027A (en) | Mass spectrometer | |
| GB2522801A (en) | High yield atmospheric pressure ion source for ion spectrometers in vacuum | |
| JPS6044A (en) | Secondary ionized mass spectrometer | |
| JP3620120B2 (en) | Method and apparatus for mass spectrometry of solutions | |
| CN115116819A (en) | Electrospray extraction ionization source | |
| DE112015000990B4 (en) | Impactor spray atmospheric pressure ion source with a target paddle | |
| JP2004294453A (en) | Ion source, mass spectrometric method, and mass spectrometer | |
| Jackett et al. | Conversion of the Finnigan‐MAT TSQ‐70 thermospray ionization interface to an electrospray ionization interface | |
| JPH04171650A (en) | Mass spectrometer |