BE758925A - Procede pour l'analyse des surfaces de corps solides par spectrometrie de masse - Google Patents
Procede pour l'analyse des surfaces de corps solides par spectrometrie de masseInfo
- Publication number
- BE758925A BE758925A BE758925DA BE758925A BE 758925 A BE758925 A BE 758925A BE 758925D A BE758925D A BE 758925DA BE 758925 A BE758925 A BE 758925A
- Authority
- BE
- Belgium
- Prior art keywords
- analysis
- mass spectrometry
- solid body
- body surfaces
- solid
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19691957311 DE1957311B2 (de) | 1969-11-14 | 1969-11-14 | Verfahren und vorrichtung zur massenspektrometirschen analyse von festkoerperoberflaechen |
Publications (1)
Publication Number | Publication Date |
---|---|
BE758925A true BE758925A (fr) | 1971-04-16 |
Family
ID=5751099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE758925D BE758925A (fr) | 1969-11-14 | Procede pour l'analyse des surfaces de corps solides par spectrometrie de masse |
Country Status (8)
Country | Link |
---|---|
US (1) | US3742227A (fr) |
BE (1) | BE758925A (fr) |
CH (1) | CH522221A (fr) |
DE (1) | DE1957311B2 (fr) |
FR (1) | FR2069444A5 (fr) |
GB (1) | GB1274580A (fr) |
IT (1) | IT954075B (fr) |
NL (1) | NL7016674A (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5812978B2 (ja) * | 1976-11-19 | 1983-03-11 | 株式会社日立製作所 | イオン線装置 |
DE3128814A1 (de) * | 1981-07-21 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie |
JPS6044A (ja) * | 1983-06-16 | 1985-01-05 | Hitachi Ltd | 二次イオン化質量分析装置 |
JPH05251039A (ja) * | 1992-03-04 | 1993-09-28 | Ebara Corp | 二次イオン質量分析計 |
GB2269934B (en) * | 1992-08-19 | 1996-03-27 | Toshiba Cambridge Res Center | Spectrometer |
KR100217325B1 (ko) * | 1996-07-02 | 1999-10-01 | 윤종용 | 반도체장치의 제조공정 분석방법 |
DE19642261A1 (de) * | 1996-10-11 | 1998-04-16 | Hoechst Ag | Verfahren und Vorrichtung zum Erkennen der katalytischen Aktivität von Feststoffen |
DE19641981C2 (de) * | 1996-10-11 | 2000-12-07 | A Benninghoven | Verfahren zur Bestimmung von Tiefenprofilen im Dünnschichtbereich |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2772363A (en) * | 1952-03-21 | 1956-11-27 | Cons Electrodynamics Corp | Method and apparatus for ionization of solids |
US3445650A (en) * | 1965-10-11 | 1969-05-20 | Applied Res Lab | Double focussing mass spectrometer including a wedge-shaped magnetic sector field |
-
0
- BE BE758925D patent/BE758925A/fr unknown
-
1969
- 1969-11-14 DE DE19691957311 patent/DE1957311B2/de active Pending
-
1970
- 1970-10-15 CH CH1527070A patent/CH522221A/de not_active IP Right Cessation
- 1970-11-10 GB GB53327/70A patent/GB1274580A/en not_active Expired
- 1970-11-12 US US00088747A patent/US3742227A/en not_active Expired - Lifetime
- 1970-11-13 IT IT31700/70A patent/IT954075B/it active
- 1970-11-13 FR FR7040856A patent/FR2069444A5/fr not_active Expired
- 1970-11-13 NL NL7016674A patent/NL7016674A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US3742227A (en) | 1973-06-26 |
NL7016674A (fr) | 1971-05-18 |
DE1957311B2 (de) | 1972-10-12 |
IT954075B (it) | 1973-08-30 |
DE1957311A1 (de) | 1971-05-27 |
CH522221A (de) | 1972-06-15 |
GB1274580A (en) | 1972-05-17 |
FR2069444A5 (fr) | 1971-09-03 |
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