IT954075B - Apparecchio per l analisi spettro metrica di massa di superfici di corpi solidi - Google Patents

Apparecchio per l analisi spettro metrica di massa di superfici di corpi solidi

Info

Publication number
IT954075B
IT954075B IT31700/70A IT3170070A IT954075B IT 954075 B IT954075 B IT 954075B IT 31700/70 A IT31700/70 A IT 31700/70A IT 3170070 A IT3170070 A IT 3170070A IT 954075 B IT954075 B IT 954075B
Authority
IT
Italy
Prior art keywords
mass spectrum
solid bodies
metric analysis
spectrum metric
analysis
Prior art date
Application number
IT31700/70A
Other languages
English (en)
Original Assignee
Bayer Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayer Ag filed Critical Bayer Ag
Application granted granted Critical
Publication of IT954075B publication Critical patent/IT954075B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
IT31700/70A 1969-11-14 1970-11-13 Apparecchio per l analisi spettro metrica di massa di superfici di corpi solidi IT954075B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691957311 DE1957311B2 (de) 1969-11-14 1969-11-14 Verfahren und vorrichtung zur massenspektrometirschen analyse von festkoerperoberflaechen

Publications (1)

Publication Number Publication Date
IT954075B true IT954075B (it) 1973-08-30

Family

ID=5751099

Family Applications (1)

Application Number Title Priority Date Filing Date
IT31700/70A IT954075B (it) 1969-11-14 1970-11-13 Apparecchio per l analisi spettro metrica di massa di superfici di corpi solidi

Country Status (8)

Country Link
US (1) US3742227A (it)
BE (1) BE758925A (it)
CH (1) CH522221A (it)
DE (1) DE1957311B2 (it)
FR (1) FR2069444A5 (it)
GB (1) GB1274580A (it)
IT (1) IT954075B (it)
NL (1) NL7016674A (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812978B2 (ja) * 1976-11-19 1983-03-11 株式会社日立製作所 イオン線装置
DE3128814A1 (de) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie
JPS6044A (ja) * 1983-06-16 1985-01-05 Hitachi Ltd 二次イオン化質量分析装置
JPH05251039A (ja) * 1992-03-04 1993-09-28 Ebara Corp 二次イオン質量分析計
GB2269934B (en) * 1992-08-19 1996-03-27 Toshiba Cambridge Res Center Spectrometer
KR100217325B1 (ko) * 1996-07-02 1999-10-01 윤종용 반도체장치의 제조공정 분석방법
DE19642261A1 (de) * 1996-10-11 1998-04-16 Hoechst Ag Verfahren und Vorrichtung zum Erkennen der katalytischen Aktivität von Feststoffen
DE19641981C2 (de) * 1996-10-11 2000-12-07 A Benninghoven Verfahren zur Bestimmung von Tiefenprofilen im Dünnschichtbereich

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2772363A (en) * 1952-03-21 1956-11-27 Cons Electrodynamics Corp Method and apparatus for ionization of solids
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field

Also Published As

Publication number Publication date
BE758925A (fr) 1971-04-16
FR2069444A5 (it) 1971-09-03
NL7016674A (it) 1971-05-18
GB1274580A (en) 1972-05-17
CH522221A (de) 1972-06-15
US3742227A (en) 1973-06-26
DE1957311B2 (de) 1972-10-12
DE1957311A1 (de) 1971-05-27

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