JPS603576A - 粒子検出システム - Google Patents

粒子検出システム

Info

Publication number
JPS603576A
JPS603576A JP59051300A JP5130084A JPS603576A JP S603576 A JPS603576 A JP S603576A JP 59051300 A JP59051300 A JP 59051300A JP 5130084 A JP5130084 A JP 5130084A JP S603576 A JPS603576 A JP S603576A
Authority
JP
Japan
Prior art keywords
sheet
particles
green sheet
screening
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59051300A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0581876B2 (show.php
Inventor
イヴス・ダ−ヴス−ボルノツ
ジヨ−ジ・イ−・メルヴイン
マイケル・ジ−・ライアン
デニス・エル・セイラ−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS603576A publication Critical patent/JPS603576A/ja
Publication of JPH0581876B2 publication Critical patent/JPH0581876B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
JP59051300A 1983-06-07 1984-03-19 粒子検出システム Granted JPS603576A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US502057 1983-06-07
US06/502,057 US4513613A (en) 1983-06-07 1983-06-07 Particle detection system

Publications (2)

Publication Number Publication Date
JPS603576A true JPS603576A (ja) 1985-01-09
JPH0581876B2 JPH0581876B2 (show.php) 1993-11-16

Family

ID=23996154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59051300A Granted JPS603576A (ja) 1983-06-07 1984-03-19 粒子検出システム

Country Status (4)

Country Link
US (1) US4513613A (show.php)
EP (1) EP0133879B1 (show.php)
JP (1) JPS603576A (show.php)
DE (1) DE3468737D1 (show.php)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6373180A (ja) * 1986-09-17 1988-04-02 Hitachi Ltd 磁気デイスクの突起検出方法
JPH0272273A (ja) * 1988-09-07 1990-03-12 Shohei Senda 薬液注入装置におけるバルブ装置
WO2008038407A1 (en) * 2006-09-26 2008-04-03 Ntn Corporation Broken piece detecting sensor
JP2008082741A (ja) * 2006-09-26 2008-04-10 Ntn Corp 破片検出センサ
JP2008082743A (ja) * 2006-09-26 2008-04-10 Ntn Corp 破片検出センサ
JP2008107148A (ja) * 2006-10-24 2008-05-08 Ntn Corp 破片検出センサ

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3705201A1 (de) * 1987-02-19 1988-09-01 Schoeller F Jun Gmbh Co Kg Vorrichtung zur messung kleiner dickenprofilaenderungen in bandfoermigem material, insbesondere fotografischem basispapier
GB8717118D0 (en) * 1987-07-20 1987-08-26 Wiggins Teape Group Ltd Determining propensity of paper/board to dust
DE3807488C1 (show.php) * 1988-03-08 1989-08-10 Robert Bosch Gmbh, 7000 Stuttgart, De
US5131753A (en) * 1990-07-23 1992-07-21 Motorola, Inc. Robotic placement device using compliant imaging surface
US5271284A (en) * 1991-10-08 1993-12-21 Bridgestone/Firestone, Inc. Lap splice width monitor
US6044695A (en) * 1997-09-02 2000-04-04 Datacard Corporation Apparatus and method for detecting contaminants on the surface of a card
US20030080757A1 (en) * 2001-11-01 2003-05-01 Groover Thomas A. Proximity sensor
US20140069463A1 (en) * 2012-09-07 2014-03-13 International Business Machines Corporation Particle detection and cleaning system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5369069A (en) * 1976-11-30 1978-06-20 Nec Corp Warpage measuring device of base plates
JPS57112237U (show.php) * 1980-12-27 1982-07-12

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1178612B (de) * 1957-02-25 1964-09-24 Armco Steel Corp Verfahren und Einrichtung zur Messung der Ab-weichung der Flachheit eines Koerpers von einem vorgegebenen Wert
US3037381A (en) * 1959-05-13 1962-06-05 Warren S D Co Bump detector
NL277561A (show.php) * 1961-05-03
GB1088871A (en) * 1964-01-24 1967-10-25 Licentia Gmbh A device for detecting creases,protuberances or the like in the surface of travelling webs or sheets of material
DE1573912A1 (de) * 1965-05-24 1970-06-04 Laszlo Urmenyi Verfahren zum Erkennen von Oberflaechenerhoehungen im Papier und anderem plattenfoermigen Material und Einrichtung zur Ausuebung des Verfahrens
DE1994156U (de) * 1965-07-07 1968-09-19 Buchtal Gmbh Vorrichtung zum fortlaufenden messen der verwindung oder kruemmung keramischer platten, insbesondere spaltplatten, sowie zum sortieren solcher platten.
GB1199328A (en) * 1966-09-07 1970-07-22 Yawata Iron & Steel Co Method of Measuring the Surface Waviness of Sheet or Strip Material
US3541843A (en) * 1967-12-29 1970-11-24 Procter & Gamble Method and apparatus for measuring fabric softness
US3502827A (en) * 1968-08-02 1970-03-24 Du Pont Apparatus for detecting foreign objects in or on moving sheets
DE2058101A1 (de) * 1970-11-26 1972-06-22 Paul Lippke Einrichtung zum Pruefen von bewegten Bahnen auf Papier u.dgl. auf Fehler wie Verfaerbungen,Loecher,Verdickungen und aehnliche Fehlstellen
DE2060696B2 (de) * 1970-12-10 1972-12-07 Lippke, Paul, 5450 Neuwied Einrichtung zum pruefen von bewegten bahnen aus papier o dgl auf falten, knoten und aehnlichen fehlstellen
DE2130025B1 (de) * 1971-06-18 1972-05-25 Nordlabor Gmbh Fuer Bautechnis Verfahren zur Bestimmung der Oberflaechenrauhigkeit insbesondere von Strassenbelaegen
CH610017A5 (show.php) * 1975-09-30 1979-03-30 Rieter Ag Maschf
JPS588458B2 (ja) * 1977-03-30 1983-02-16 株式会社日立製作所 形状検出装置
DE2911649C3 (de) * 1979-03-24 1982-05-27 Feldmühle AG, 4000 Düsseldorf Verfahren und Vorrichtung zur Prüfung des Durchschlagverhaltens von Beschichtungsmassen und Beschichtungsträgern
US4271699A (en) * 1979-12-07 1981-06-09 Williamson Harry L Sheet thickness monitoring system and method
DD154037C2 (de) * 1980-11-03 1986-07-02 Gerd Schuchardt Anordnung zur gerad- und ebenheitsmessung
US4347735A (en) * 1980-12-15 1982-09-07 International Business Machines Corporation Process for monitoring solvent content of green ceramic sheet, and apparatus therefor
US4443278A (en) * 1981-05-26 1984-04-17 International Business Machines Corporation Inspection of multilayer ceramic circuit modules by electrical inspection of green specimens
JPS58195539A (ja) * 1982-05-11 1983-11-14 キヤノン株式会社 眼底カメラ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5369069A (en) * 1976-11-30 1978-06-20 Nec Corp Warpage measuring device of base plates
JPS57112237U (show.php) * 1980-12-27 1982-07-12

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6373180A (ja) * 1986-09-17 1988-04-02 Hitachi Ltd 磁気デイスクの突起検出方法
JPH0272273A (ja) * 1988-09-07 1990-03-12 Shohei Senda 薬液注入装置におけるバルブ装置
WO2008038407A1 (en) * 2006-09-26 2008-04-03 Ntn Corporation Broken piece detecting sensor
JP2008082741A (ja) * 2006-09-26 2008-04-10 Ntn Corp 破片検出センサ
JP2008082743A (ja) * 2006-09-26 2008-04-10 Ntn Corp 破片検出センサ
US8018237B2 (en) 2006-09-26 2011-09-13 Ntn Corporation Broken piece detecting sensor
JP2008107148A (ja) * 2006-10-24 2008-05-08 Ntn Corp 破片検出センサ

Also Published As

Publication number Publication date
EP0133879A1 (de) 1985-03-13
JPH0581876B2 (show.php) 1993-11-16
DE3468737D1 (en) 1988-02-18
EP0133879B1 (de) 1988-01-13
US4513613A (en) 1985-04-30

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