JPS6034013A - 固体薄膜の製造方法 - Google Patents

固体薄膜の製造方法

Info

Publication number
JPS6034013A
JPS6034013A JP58142787A JP14278783A JPS6034013A JP S6034013 A JPS6034013 A JP S6034013A JP 58142787 A JP58142787 A JP 58142787A JP 14278783 A JP14278783 A JP 14278783A JP S6034013 A JPS6034013 A JP S6034013A
Authority
JP
Japan
Prior art keywords
gas
chamber
molecules
energy
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58142787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459769B2 (cg-RX-API-DMAC10.html
Inventor
Uichi Ito
伊東　宇一
Masashi Kumada
熊田　虔
Nobuaki Washida
鷲田　伸明
Hajime Inoue
元 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58142787A priority Critical patent/JPS6034013A/ja
Publication of JPS6034013A publication Critical patent/JPS6034013A/ja
Publication of JPH0459769B2 publication Critical patent/JPH0459769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H10P14/3411—
JP58142787A 1983-08-04 1983-08-04 固体薄膜の製造方法 Granted JPS6034013A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58142787A JPS6034013A (ja) 1983-08-04 1983-08-04 固体薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58142787A JPS6034013A (ja) 1983-08-04 1983-08-04 固体薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6034013A true JPS6034013A (ja) 1985-02-21
JPH0459769B2 JPH0459769B2 (cg-RX-API-DMAC10.html) 1992-09-24

Family

ID=15323591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58142787A Granted JPS6034013A (ja) 1983-08-04 1983-08-04 固体薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6034013A (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174382A (ja) * 1986-01-27 1987-07-31 Shindengen Electric Mfg Co Ltd 気相より金属合金を堆積させる方法および装置
JPS6446936A (en) * 1987-08-17 1989-02-21 Nippon Telegraph & Telephone Growth method of thin film
JPH0420901U (cg-RX-API-DMAC10.html) * 1990-06-12 1992-02-21

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5362982A (en) * 1976-11-17 1978-06-05 Toshiba Corp Plasma cvd apparatus
JPS5667538A (en) * 1979-11-06 1981-06-06 Fujitsu Ltd Plasma oxidation method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5362982A (en) * 1976-11-17 1978-06-05 Toshiba Corp Plasma cvd apparatus
JPS5667538A (en) * 1979-11-06 1981-06-06 Fujitsu Ltd Plasma oxidation method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174382A (ja) * 1986-01-27 1987-07-31 Shindengen Electric Mfg Co Ltd 気相より金属合金を堆積させる方法および装置
JPS6446936A (en) * 1987-08-17 1989-02-21 Nippon Telegraph & Telephone Growth method of thin film
JPH0420901U (cg-RX-API-DMAC10.html) * 1990-06-12 1992-02-21

Also Published As

Publication number Publication date
JPH0459769B2 (cg-RX-API-DMAC10.html) 1992-09-24

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