JPS6032756U - 電子線反射回折像観察装置 - Google Patents

電子線反射回折像観察装置

Info

Publication number
JPS6032756U
JPS6032756U JP12527683U JP12527683U JPS6032756U JP S6032756 U JPS6032756 U JP S6032756U JP 12527683 U JP12527683 U JP 12527683U JP 12527683 U JP12527683 U JP 12527683U JP S6032756 U JPS6032756 U JP S6032756U
Authority
JP
Japan
Prior art keywords
electron beam
observation device
diffraction image
image observation
reflection diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12527683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037880Y2 (cs
Inventor
吉岡　忠則
栄一 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP12527683U priority Critical patent/JPS6032756U/ja
Publication of JPS6032756U publication Critical patent/JPS6032756U/ja
Application granted granted Critical
Publication of JPH037880Y2 publication Critical patent/JPH037880Y2/ja
Granted legal-status Critical Current

Links

JP12527683U 1983-08-12 1983-08-12 電子線反射回折像観察装置 Granted JPS6032756U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12527683U JPS6032756U (ja) 1983-08-12 1983-08-12 電子線反射回折像観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12527683U JPS6032756U (ja) 1983-08-12 1983-08-12 電子線反射回折像観察装置

Publications (2)

Publication Number Publication Date
JPS6032756U true JPS6032756U (ja) 1985-03-06
JPH037880Y2 JPH037880Y2 (cs) 1991-02-27

Family

ID=30285289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12527683U Granted JPS6032756U (ja) 1983-08-12 1983-08-12 電子線反射回折像観察装置

Country Status (1)

Country Link
JP (1) JPS6032756U (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4429151Y1 (cs) * 1968-04-18 1969-12-03
JPS58158846A (ja) * 1982-03-15 1983-09-21 Jeol Ltd 電子顕微鏡

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4429151Y1 (cs) * 1968-04-18 1969-12-03
JPS58158846A (ja) * 1982-03-15 1983-09-21 Jeol Ltd 電子顕微鏡

Also Published As

Publication number Publication date
JPH037880Y2 (cs) 1991-02-27

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