JPS6031112A - 走査光子顕微鏡 - Google Patents

走査光子顕微鏡

Info

Publication number
JPS6031112A
JPS6031112A JP58139428A JP13942883A JPS6031112A JP S6031112 A JPS6031112 A JP S6031112A JP 58139428 A JP58139428 A JP 58139428A JP 13942883 A JP13942883 A JP 13942883A JP S6031112 A JPS6031112 A JP S6031112A
Authority
JP
Japan
Prior art keywords
scanning
signal
light spot
oscillator
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58139428A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428284B2 (enExample
Inventor
Kanji Koname
木滑　寛治
Tadasuke Munakata
忠輔 棟方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58139428A priority Critical patent/JPS6031112A/ja
Publication of JPS6031112A publication Critical patent/JPS6031112A/ja
Publication of JPH0428284B2 publication Critical patent/JPH0428284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58139428A 1983-08-01 1983-08-01 走査光子顕微鏡 Granted JPS6031112A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58139428A JPS6031112A (ja) 1983-08-01 1983-08-01 走査光子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58139428A JPS6031112A (ja) 1983-08-01 1983-08-01 走査光子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6031112A true JPS6031112A (ja) 1985-02-16
JPH0428284B2 JPH0428284B2 (enExample) 1992-05-14

Family

ID=15244962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58139428A Granted JPS6031112A (ja) 1983-08-01 1983-08-01 走査光子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6031112A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0321913A (ja) * 1989-06-19 1991-01-30 Tokyo Electron Ltd 走査型顕微鏡装置
US5003815A (en) * 1989-10-20 1991-04-02 International Business Machines Corporation Atomic photo-absorption force microscope
JPH03177068A (ja) * 1989-12-05 1991-08-01 Mitsubishi Electric Corp 半導体装置
JPH04125609A (ja) * 1990-09-18 1992-04-27 Satoshi Kawada 光学顕微鏡
JP2008178201A (ja) * 2007-01-17 2008-07-31 Chugoku Electric Power Co Inc:The 線材剥離具
WO2022092077A1 (ja) * 2020-10-28 2022-05-05 株式会社日立ハイテク 荷電粒子ビーム装置および試料観察方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0321913A (ja) * 1989-06-19 1991-01-30 Tokyo Electron Ltd 走査型顕微鏡装置
US5003815A (en) * 1989-10-20 1991-04-02 International Business Machines Corporation Atomic photo-absorption force microscope
JPH03177068A (ja) * 1989-12-05 1991-08-01 Mitsubishi Electric Corp 半導体装置
JPH04125609A (ja) * 1990-09-18 1992-04-27 Satoshi Kawada 光学顕微鏡
JP2008178201A (ja) * 2007-01-17 2008-07-31 Chugoku Electric Power Co Inc:The 線材剥離具
WO2022092077A1 (ja) * 2020-10-28 2022-05-05 株式会社日立ハイテク 荷電粒子ビーム装置および試料観察方法
US20230343549A1 (en) * 2020-10-28 2023-10-26 Hitachi High-Tech Corporation Charged Particle Beam Device and Specimen Observation Method

Also Published As

Publication number Publication date
JPH0428284B2 (enExample) 1992-05-14

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