JPH0428284B2 - - Google Patents
Info
- Publication number
- JPH0428284B2 JPH0428284B2 JP58139428A JP13942883A JPH0428284B2 JP H0428284 B2 JPH0428284 B2 JP H0428284B2 JP 58139428 A JP58139428 A JP 58139428A JP 13942883 A JP13942883 A JP 13942883A JP H0428284 B2 JPH0428284 B2 JP H0428284B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light spot
- signal
- oscillator
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000000386 microscopy Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 238000009826 distribution Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58139428A JPS6031112A (ja) | 1983-08-01 | 1983-08-01 | 走査光子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58139428A JPS6031112A (ja) | 1983-08-01 | 1983-08-01 | 走査光子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6031112A JPS6031112A (ja) | 1985-02-16 |
| JPH0428284B2 true JPH0428284B2 (enExample) | 1992-05-14 |
Family
ID=15244962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58139428A Granted JPS6031112A (ja) | 1983-08-01 | 1983-08-01 | 走査光子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6031112A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2724502B2 (ja) * | 1989-06-19 | 1998-03-09 | 東京エレクトロン株式会社 | 走査型顕微鏡装置 |
| US5003815A (en) * | 1989-10-20 | 1991-04-02 | International Business Machines Corporation | Atomic photo-absorption force microscope |
| JPH0697691B2 (ja) * | 1989-12-05 | 1994-11-30 | 三菱電機株式会社 | 半導体装置 |
| JPH04125609A (ja) * | 1990-09-18 | 1992-04-27 | Satoshi Kawada | 光学顕微鏡 |
| JP4916318B2 (ja) * | 2007-01-17 | 2012-04-11 | 中国電力株式会社 | 線材剥離具 |
| WO2022091234A1 (ja) * | 2020-10-28 | 2022-05-05 | 株式会社日立ハイテク | 荷電粒子ビーム装置および試料観察方法 |
-
1983
- 1983-08-01 JP JP58139428A patent/JPS6031112A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6031112A (ja) | 1985-02-16 |
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