JPS6031039A - スル−ホ−ルの目詰まり検査装置 - Google Patents
スル−ホ−ルの目詰まり検査装置Info
- Publication number
- JPS6031039A JPS6031039A JP14010583A JP14010583A JPS6031039A JP S6031039 A JPS6031039 A JP S6031039A JP 14010583 A JP14010583 A JP 14010583A JP 14010583 A JP14010583 A JP 14010583A JP S6031039 A JPS6031039 A JP S6031039A
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- hole
- inspection device
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 38
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 24
- 238000002834 transmittance Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010583A JPS6031039A (ja) | 1983-07-30 | 1983-07-30 | スル−ホ−ルの目詰まり検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010583A JPS6031039A (ja) | 1983-07-30 | 1983-07-30 | スル−ホ−ルの目詰まり検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6031039A true JPS6031039A (ja) | 1985-02-16 |
| JPH037258B2 JPH037258B2 (enrdf_load_stackoverflow) | 1991-02-01 |
Family
ID=15261051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14010583A Granted JPS6031039A (ja) | 1983-07-30 | 1983-07-30 | スル−ホ−ルの目詰まり検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6031039A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6232600U (enrdf_load_stackoverflow) * | 1985-08-13 | 1987-02-26 | ||
| JPS63102095A (ja) * | 1986-10-20 | 1988-05-06 | Nippon Telegr & Teleph Corp <Ntt> | 半導体記憶装置 |
| JPS63133040A (ja) * | 1986-11-25 | 1988-06-04 | Rion Co Ltd | 光散乱式微粒子計 |
| JPS63177394A (ja) * | 1987-01-17 | 1988-07-21 | Mitsubishi Electric Corp | Ｍｏｓ記憶装置 |
| JPS63239679A (ja) * | 1987-03-27 | 1988-10-05 | Hitachi Ltd | 半導体記憶装置 |
| JP2008261790A (ja) * | 2007-04-13 | 2008-10-30 | Hitachi High-Technologies Corp | 欠陥検査装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107148A (en) * | 1980-01-31 | 1981-08-25 | Toshiba Corp | Clogging check device for monolithic object |
| JPS5742840A (en) * | 1980-08-27 | 1982-03-10 | Toshiba Corp | Detector for clogging of filter |
-
1983
- 1983-07-30 JP JP14010583A patent/JPS6031039A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107148A (en) * | 1980-01-31 | 1981-08-25 | Toshiba Corp | Clogging check device for monolithic object |
| JPS5742840A (en) * | 1980-08-27 | 1982-03-10 | Toshiba Corp | Detector for clogging of filter |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6232600U (enrdf_load_stackoverflow) * | 1985-08-13 | 1987-02-26 | ||
| JPS63102095A (ja) * | 1986-10-20 | 1988-05-06 | Nippon Telegr & Teleph Corp <Ntt> | 半導体記憶装置 |
| JPS63133040A (ja) * | 1986-11-25 | 1988-06-04 | Rion Co Ltd | 光散乱式微粒子計 |
| JPS63177394A (ja) * | 1987-01-17 | 1988-07-21 | Mitsubishi Electric Corp | Ｍｏｓ記憶装置 |
| JPS63239679A (ja) * | 1987-03-27 | 1988-10-05 | Hitachi Ltd | 半導体記憶装置 |
| JP2008261790A (ja) * | 2007-04-13 | 2008-10-30 | Hitachi High-Technologies Corp | 欠陥検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037258B2 (enrdf_load_stackoverflow) | 1991-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0501683B1 (en) | Technique for enhanced two-dimensional imaging | |
| KR920005862B1 (ko) | X선 투과화성에 의한 납땜부의 검사방법과 그 장치 및 기판에의 전자부품의 내장구조 | |
| JPH0231144A (ja) | プリント基板検査装置 | |
| JPS6031039A (ja) | スル−ホ−ルの目詰まり検査装置 | |
| JP6160255B2 (ja) | 太陽電池セル検査装置および太陽電池セル検査装置の画像位置補正方法 | |
| JPH0469511A (ja) | 半田付部及び実装部品の外観検査装置 | |
| JPH04104044A (ja) | 半田ペーストの印刷状態検査装置 | |
| JP2009276208A (ja) | 実装基板の外観検査方法 | |
| JPS63229311A (ja) | 断面形状検知方法 | |
| JPS60256004A (ja) | チツプ部品のはんだ付検査方法 | |
| JPH029506B2 (enrdf_load_stackoverflow) | ||
| JPH0329807A (ja) | 画像処理による半田量判別方法 | |
| JPH0414281B2 (enrdf_load_stackoverflow) | ||
| JP2997306B2 (ja) | 透過照明を用いたパターン位置検出方法およびその装置 | |
| JPH0269641A (ja) | 被測定物の反射光取込み装置 | |
| JP2004151010A (ja) | ハンダ付け検査装置 | |
| JPH11312241A (ja) | パターン検査装置 | |
| KR101442770B1 (ko) | 기판 검사 장치 | |
| JPS62299705A (ja) | 実装部品検査装置 | |
| JPH03233373A (ja) | ハンダブリッジ検査装置 | |
| JPH0215377A (ja) | はんだ付検査方法 | |
| JPS637602B2 (enrdf_load_stackoverflow) | ||
| JP2007147547A (ja) | 濃度ムラ検査装置 | |
| JPH08189906A (ja) | 半田付け外観検査方法および装置 | |
| JP2003152330A (ja) | 半田外観検査方法および半田外観検査装置 |