JPH037258B2 - - Google Patents

Info

Publication number
JPH037258B2
JPH037258B2 JP58140105A JP14010583A JPH037258B2 JP H037258 B2 JPH037258 B2 JP H037258B2 JP 58140105 A JP58140105 A JP 58140105A JP 14010583 A JP14010583 A JP 14010583A JP H037258 B2 JPH037258 B2 JP H037258B2
Authority
JP
Japan
Prior art keywords
light
hole
inspected
inspection device
clogging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58140105A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6031039A (ja
Inventor
Taku Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP14010583A priority Critical patent/JPS6031039A/ja
Publication of JPS6031039A publication Critical patent/JPS6031039A/ja
Publication of JPH037258B2 publication Critical patent/JPH037258B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP14010583A 1983-07-30 1983-07-30 スル−ホ−ルの目詰まり検査装置 Granted JPS6031039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14010583A JPS6031039A (ja) 1983-07-30 1983-07-30 スル−ホ−ルの目詰まり検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14010583A JPS6031039A (ja) 1983-07-30 1983-07-30 スル−ホ−ルの目詰まり検査装置

Publications (2)

Publication Number Publication Date
JPS6031039A JPS6031039A (ja) 1985-02-16
JPH037258B2 true JPH037258B2 (enrdf_load_stackoverflow) 1991-02-01

Family

ID=15261051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14010583A Granted JPS6031039A (ja) 1983-07-30 1983-07-30 スル−ホ−ルの目詰まり検査装置

Country Status (1)

Country Link
JP (1) JPS6031039A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6232600U (enrdf_load_stackoverflow) * 1985-08-13 1987-02-26
JPS63102095A (ja) * 1986-10-20 1988-05-06 Nippon Telegr & Teleph Corp <Ntt> 半導体記憶装置
JPS63133040A (ja) * 1986-11-25 1988-06-04 Rion Co Ltd 光散乱式微粒子計
JPS63177394A (ja) * 1987-01-17 1988-07-21 Mitsubishi Electric Corp Ｍｏｓ記憶装置
JPS63239679A (ja) * 1987-03-27 1988-10-05 Hitachi Ltd 半導体記憶装置
JP2008261790A (ja) * 2007-04-13 2008-10-30 Hitachi High-Technologies Corp 欠陥検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107148A (en) * 1980-01-31 1981-08-25 Toshiba Corp Clogging check device for monolithic object
JPS5742840A (en) * 1980-08-27 1982-03-10 Toshiba Corp Detector for clogging of filter

Also Published As

Publication number Publication date
JPS6031039A (ja) 1985-02-16

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