JPS60259347A - 圧電型微動変位素子及びこれを使用した微少位置決め方法 - Google Patents

圧電型微動変位素子及びこれを使用した微少位置決め方法

Info

Publication number
JPS60259347A
JPS60259347A JP59113290A JP11329084A JPS60259347A JP S60259347 A JPS60259347 A JP S60259347A JP 59113290 A JP59113290 A JP 59113290A JP 11329084 A JP11329084 A JP 11329084A JP S60259347 A JPS60259347 A JP S60259347A
Authority
JP
Japan
Prior art keywords
piezoelectric element
displacement
voltage
pressure
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59113290A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0335055B2 (enExample
Inventor
Makoto Higomura
肥後村　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59113290A priority Critical patent/JPS60259347A/ja
Publication of JPS60259347A publication Critical patent/JPS60259347A/ja
Publication of JPH0335055B2 publication Critical patent/JPH0335055B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP59113290A 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法 Granted JPS60259347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59113290A JPS60259347A (ja) 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59113290A JPS60259347A (ja) 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法

Publications (2)

Publication Number Publication Date
JPS60259347A true JPS60259347A (ja) 1985-12-21
JPH0335055B2 JPH0335055B2 (enExample) 1991-05-24

Family

ID=14608433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59113290A Granted JPS60259347A (ja) 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法

Country Status (1)

Country Link
JP (1) JPS60259347A (enExample)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243511A (ja) * 1985-04-20 1986-10-29 Yotaro Hatamura 微細位置決め装置
JPS62165380A (ja) * 1986-01-14 1987-07-21 Nec Corp 積層圧電素子
JPS62234380A (ja) * 1986-01-08 1987-10-14 Hitachi Metals Ltd 荷重特性の良好な積層型圧電素子
JPS6343383A (ja) * 1986-08-08 1988-02-24 Toyota Motor Corp 圧電駆動装置
JPS63226708A (ja) * 1987-03-17 1988-09-21 Hitachi Constr Mach Co Ltd 微細位置決め装置
EP0264147A3 (en) * 1986-09-09 1988-10-05 Hitachi Construction Machinery Co., Ltd. Fine positioning device and displacement controller therefor
JPS644818A (en) * 1987-06-29 1989-01-10 Hitachi Construction Machinery Actuator fitting structure for minutely positioning device
JPS6419979A (en) * 1987-07-10 1989-01-24 Lossev Tech Corp Device for driving piezoelectric actuator for precision positioning
JPS6433764U (enExample) * 1987-08-21 1989-03-02
US5138885A (en) * 1990-03-16 1992-08-18 Matsushita Electric Industrial Co., Ltd. Piezoelectric-type pressure sensor
EP0569595A4 (en) * 1991-11-15 1994-05-11 Yotaro Hatamura Feed screw device and precisely positioning micromotion feed system
JPH06230827A (ja) * 1993-09-10 1994-08-19 Yotaro Hatamura 微細位置決め装置
JP2005236166A (ja) * 2004-02-23 2005-09-02 Bondotekku:Kk ピエゾアライメント方式
JP2009170677A (ja) * 2008-01-16 2009-07-30 Advantest Corp 圧電駆動装置、圧電駆動制御方法及び電子デバイス
CN103481106A (zh) * 2013-07-05 2014-01-01 哈尔滨工业大学 一种超精密飞切加工机床的压电陶瓷式微进给装置

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243511A (ja) * 1985-04-20 1986-10-29 Yotaro Hatamura 微細位置決め装置
JPS62234380A (ja) * 1986-01-08 1987-10-14 Hitachi Metals Ltd 荷重特性の良好な積層型圧電素子
JPS62165380A (ja) * 1986-01-14 1987-07-21 Nec Corp 積層圧電素子
JPS6343383A (ja) * 1986-08-08 1988-02-24 Toyota Motor Corp 圧電駆動装置
EP0264147A3 (en) * 1986-09-09 1988-10-05 Hitachi Construction Machinery Co., Ltd. Fine positioning device and displacement controller therefor
JPS63226708A (ja) * 1987-03-17 1988-09-21 Hitachi Constr Mach Co Ltd 微細位置決め装置
JPS644818A (en) * 1987-06-29 1989-01-10 Hitachi Construction Machinery Actuator fitting structure for minutely positioning device
JPS6419979A (en) * 1987-07-10 1989-01-24 Lossev Tech Corp Device for driving piezoelectric actuator for precision positioning
JPS6433764U (enExample) * 1987-08-21 1989-03-02
US5138885A (en) * 1990-03-16 1992-08-18 Matsushita Electric Industrial Co., Ltd. Piezoelectric-type pressure sensor
EP0569595A4 (en) * 1991-11-15 1994-05-11 Yotaro Hatamura Feed screw device and precisely positioning micromotion feed system
US5644951A (en) * 1991-11-15 1997-07-08 Hatamura; Yotaro Feed screw apparatus and precise positioning and fine feed system
JPH06230827A (ja) * 1993-09-10 1994-08-19 Yotaro Hatamura 微細位置決め装置
JP2005236166A (ja) * 2004-02-23 2005-09-02 Bondotekku:Kk ピエゾアライメント方式
JP2009170677A (ja) * 2008-01-16 2009-07-30 Advantest Corp 圧電駆動装置、圧電駆動制御方法及び電子デバイス
US7999438B2 (en) 2008-01-16 2011-08-16 Advantest Corporation Piezoelectric-drive apparatus, method of controlling piezoelectric-drive and electronic device
CN103481106A (zh) * 2013-07-05 2014-01-01 哈尔滨工业大学 一种超精密飞切加工机床的压电陶瓷式微进给装置

Also Published As

Publication number Publication date
JPH0335055B2 (enExample) 1991-05-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees