JPH0335055B2 - - Google Patents

Info

Publication number
JPH0335055B2
JPH0335055B2 JP59113290A JP11329084A JPH0335055B2 JP H0335055 B2 JPH0335055 B2 JP H0335055B2 JP 59113290 A JP59113290 A JP 59113290A JP 11329084 A JP11329084 A JP 11329084A JP H0335055 B2 JPH0335055 B2 JP H0335055B2
Authority
JP
Japan
Prior art keywords
displacement
piezoelectric element
piezoelectric
pressure
driving force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59113290A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60259347A (ja
Inventor
Makoto Higomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59113290A priority Critical patent/JPS60259347A/ja
Publication of JPS60259347A publication Critical patent/JPS60259347A/ja
Publication of JPH0335055B2 publication Critical patent/JPH0335055B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP59113290A 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法 Granted JPS60259347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59113290A JPS60259347A (ja) 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59113290A JPS60259347A (ja) 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法

Publications (2)

Publication Number Publication Date
JPS60259347A JPS60259347A (ja) 1985-12-21
JPH0335055B2 true JPH0335055B2 (enExample) 1991-05-24

Family

ID=14608433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59113290A Granted JPS60259347A (ja) 1984-06-02 1984-06-02 圧電型微動変位素子及びこれを使用した微少位置決め方法

Country Status (1)

Country Link
JP (1) JPS60259347A (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07109566B2 (ja) * 1985-04-20 1995-11-22 洋太郎 畑村 微細位置決め装置
JPS62234380A (ja) * 1986-01-08 1987-10-14 Hitachi Metals Ltd 荷重特性の良好な積層型圧電素子
JPS62165380A (ja) * 1986-01-14 1987-07-21 Nec Corp 積層圧電素子
JP2500684B2 (ja) * 1986-08-08 1996-05-29 トヨタ自動車株式会社 圧電駆動装置
EP0264147B1 (en) * 1986-09-09 1994-01-12 Hitachi Construction Machinery Co., Ltd. Fine positioning device and displacement controller therefor
JPS63226708A (ja) * 1987-03-17 1988-09-21 Hitachi Constr Mach Co Ltd 微細位置決め装置
JPH071456B2 (ja) * 1987-06-29 1995-01-11 日立建機株式会社 微細位置決め装置の積層形圧電アクチュエータ取付構造
JPS6419979A (en) * 1987-07-10 1989-01-24 Lossev Tech Corp Device for driving piezoelectric actuator for precision positioning
JPS6433764U (enExample) * 1987-08-21 1989-03-02
TW221491B (enExample) * 1990-03-16 1994-03-01 Matsushita Electric Industrial Co Ltd
EP0569595B1 (en) * 1991-11-15 1999-10-13 Yotaro Hatamura Feed screw device and precisely positioning micromotion feed system
JPH07104723B2 (ja) * 1993-09-10 1995-11-13 洋太郎 畑村 微細位置決め装置
JP4563695B2 (ja) * 2004-02-23 2010-10-13 ボンドテック株式会社 加圧方法および接合装置
JP4714227B2 (ja) * 2008-01-16 2011-06-29 株式会社アドバンテスト 圧電駆動装置、圧電駆動制御方法及び電子デバイス
CN103481106B (zh) * 2013-07-05 2016-06-22 哈尔滨工业大学 一种超精密飞切加工机床的压电陶瓷式微进给装置

Also Published As

Publication number Publication date
JPS60259347A (ja) 1985-12-21

Similar Documents

Publication Publication Date Title
JPH0335055B2 (enExample)
US4920660A (en) Fine positioning device and displacement controller therefor
EP0338688A1 (en) Accelerometer
Kouno et al. A fast response piezoelectric actuator for servo correction of systematic errors in precision machining
JPH02116755A (ja) 加速度計及びその較正方法
EP0391880B1 (en) Measurement and control of magnetostrictive transducer motion
US6234032B1 (en) Load measuring method and an apparatus therefor
US20060065039A1 (en) Methods and apparatus for reducing vibration rectification errors in closed-loop accelerometers
JPH06151272A (ja) 加速度フィードバック付き微動位置決め装置
JPS6161053B2 (enExample)
JP3276533B2 (ja) 力フィードバック付き微動位置決め装置
JP3136888B2 (ja) 加速度センサの感度調整装置
JPH07319548A (ja) 微動位置決め制御装置
JP3130647B2 (ja) 微動機構
JPH01244511A (ja) 微動機構
JP3287244B2 (ja) 加速度検出装置
JPS58182706A (ja) ロボツトの数値制御方法
JPH0650706A (ja) 走査型トンネル顕微鏡の微動機構
JPH08241850A (ja) 微動位置決め制御装置
JPS6263317A (ja) 微小変位発生装置
JPH01136582A (ja) 速度制御装置
JPS6134932B2 (enExample)
JP2728697B2 (ja) 電動機のトルク制御方式
JPH01318932A (ja) 荷重検出器
DE19857124A1 (de) Kraftsensor-System und Kraftsensor, Verfahren zu seiner Herstellung und Verfahren zu seinem Betrieb

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees