JPS60255676A - 熱分解窒化硼素成形体の製造方法 - Google Patents
熱分解窒化硼素成形体の製造方法Info
- Publication number
- JPS60255676A JPS60255676A JP59110192A JP11019284A JPS60255676A JP S60255676 A JPS60255676 A JP S60255676A JP 59110192 A JP59110192 A JP 59110192A JP 11019284 A JP11019284 A JP 11019284A JP S60255676 A JPS60255676 A JP S60255676A
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- graphite
- powder
- powder layer
- molded body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 21
- 229910052582 BN Inorganic materials 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 41
- 229910002804 graphite Inorganic materials 0.000 claims description 36
- 239000010439 graphite Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 31
- 239000000843 powder Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 7
- 230000035939 shock Effects 0.000 description 7
- 238000005336 cracking Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 241000683481 Oedostethus Species 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
- Ceramic Products (AREA)
- Producing Shaped Articles From Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59110192A JPS60255676A (ja) | 1984-05-30 | 1984-05-30 | 熱分解窒化硼素成形体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59110192A JPS60255676A (ja) | 1984-05-30 | 1984-05-30 | 熱分解窒化硼素成形体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60255676A true JPS60255676A (ja) | 1985-12-17 |
| JPH0229629B2 JPH0229629B2 (cg-RX-API-DMAC7.html) | 1990-07-02 |
Family
ID=14529379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59110192A Granted JPS60255676A (ja) | 1984-05-30 | 1984-05-30 | 熱分解窒化硼素成形体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60255676A (cg-RX-API-DMAC7.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62182128A (ja) * | 1986-02-06 | 1987-08-10 | Shin Etsu Chem Co Ltd | 光フアイバ−母材の製造方法 |
| JPH05105523A (ja) * | 1991-10-17 | 1993-04-27 | Shin Etsu Chem Co Ltd | 熱分解窒化ほう素成形体の製造方法 |
| CN107244943A (zh) * | 2017-07-10 | 2017-10-13 | 巩义市泛锐熠辉复合材料有限公司 | 一种反应熔体浸渗法制备C/C‑SiC复合材料用石墨坩埚表面涂层的制备方法 |
| CN108545914A (zh) * | 2018-05-18 | 2018-09-18 | 山东国晶新材料有限公司 | 一种解决氧化的防起层的热解氮化硼涂层热弯模具的制备方法 |
-
1984
- 1984-05-30 JP JP59110192A patent/JPS60255676A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62182128A (ja) * | 1986-02-06 | 1987-08-10 | Shin Etsu Chem Co Ltd | 光フアイバ−母材の製造方法 |
| JPH05105523A (ja) * | 1991-10-17 | 1993-04-27 | Shin Etsu Chem Co Ltd | 熱分解窒化ほう素成形体の製造方法 |
| CN107244943A (zh) * | 2017-07-10 | 2017-10-13 | 巩义市泛锐熠辉复合材料有限公司 | 一种反应熔体浸渗法制备C/C‑SiC复合材料用石墨坩埚表面涂层的制备方法 |
| CN107244943B (zh) * | 2017-07-10 | 2020-11-03 | 巩义市泛锐熠辉复合材料有限公司 | 一种反应熔体浸渗法制备C/C-SiC复合材料用石墨坩埚表面涂层的制备方法 |
| CN108545914A (zh) * | 2018-05-18 | 2018-09-18 | 山东国晶新材料有限公司 | 一种解决氧化的防起层的热解氮化硼涂层热弯模具的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0229629B2 (cg-RX-API-DMAC7.html) | 1990-07-02 |
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