JPS60255613A - 水素化ケイ素の製造方法 - Google Patents

水素化ケイ素の製造方法

Info

Publication number
JPS60255613A
JPS60255613A JP11070384A JP11070384A JPS60255613A JP S60255613 A JPS60255613 A JP S60255613A JP 11070384 A JP11070384 A JP 11070384A JP 11070384 A JP11070384 A JP 11070384A JP S60255613 A JPS60255613 A JP S60255613A
Authority
JP
Japan
Prior art keywords
reaction
silicon
diethyl ether
hydroxide
silicon compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11070384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480845B2 (enExample
Inventor
Masayoshi Ito
正義 伊藤
Hiroji Miyagawa
博治 宮川
Toshihiro Abe
智弘 安部
Kiyougo Koizumi
鏡悟 小泉
Noriyuki Yanagawa
紀行 柳川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP11070384A priority Critical patent/JPS60255613A/ja
Publication of JPS60255613A publication Critical patent/JPS60255613A/ja
Publication of JPH0480845B2 publication Critical patent/JPH0480845B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP11070384A 1984-06-01 1984-06-01 水素化ケイ素の製造方法 Granted JPS60255613A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11070384A JPS60255613A (ja) 1984-06-01 1984-06-01 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11070384A JPS60255613A (ja) 1984-06-01 1984-06-01 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS60255613A true JPS60255613A (ja) 1985-12-17
JPH0480845B2 JPH0480845B2 (enExample) 1992-12-21

Family

ID=14542313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11070384A Granted JPS60255613A (ja) 1984-06-01 1984-06-01 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS60255613A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010079842A1 (ja) * 2009-01-09 2010-07-15 独立行政法人科学技術振興機構 高次シラン組成物および膜付基板の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010079842A1 (ja) * 2009-01-09 2010-07-15 独立行政法人科学技術振興機構 高次シラン組成物および膜付基板の製造方法
JP2010159191A (ja) * 2009-01-09 2010-07-22 Japan Science & Technology Agency 高次シラン組成物、膜付基板の製造方法、電気光学装置および電子デバイス
US8673682B2 (en) 2009-01-09 2014-03-18 Japan Science And Technology Agency High order silane composition and method of manufacturing a film-coated substrate

Also Published As

Publication number Publication date
JPH0480845B2 (enExample) 1992-12-21

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