JPS6024578B2 - スパツタ装置 - Google Patents

スパツタ装置

Info

Publication number
JPS6024578B2
JPS6024578B2 JP2065975A JP2065975A JPS6024578B2 JP S6024578 B2 JPS6024578 B2 JP S6024578B2 JP 2065975 A JP2065975 A JP 2065975A JP 2065975 A JP2065975 A JP 2065975A JP S6024578 B2 JPS6024578 B2 JP S6024578B2
Authority
JP
Japan
Prior art keywords
gas
vacuum
sputtering
atmosphere
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2065975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5194111A (enrdf_load_stackoverflow
Inventor
立男 麻蒔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN ANERUBA KK
Original Assignee
NICHIDEN ANERUBA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN ANERUBA KK filed Critical NICHIDEN ANERUBA KK
Priority to JP2065975A priority Critical patent/JPS6024578B2/ja
Publication of JPS5194111A publication Critical patent/JPS5194111A/ja
Publication of JPS6024578B2 publication Critical patent/JPS6024578B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2065975A 1975-02-18 1975-02-18 スパツタ装置 Expired JPS6024578B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2065975A JPS6024578B2 (ja) 1975-02-18 1975-02-18 スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2065975A JPS6024578B2 (ja) 1975-02-18 1975-02-18 スパツタ装置

Publications (2)

Publication Number Publication Date
JPS5194111A JPS5194111A (enrdf_load_stackoverflow) 1976-08-18
JPS6024578B2 true JPS6024578B2 (ja) 1985-06-13

Family

ID=12033328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2065975A Expired JPS6024578B2 (ja) 1975-02-18 1975-02-18 スパツタ装置

Country Status (1)

Country Link
JP (1) JPS6024578B2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5194111A (enrdf_load_stackoverflow) 1976-08-18

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