JPS5194111A - - Google Patents

Info

Publication number
JPS5194111A
JPS5194111A JP50020659A JP2065975A JPS5194111A JP S5194111 A JPS5194111 A JP S5194111A JP 50020659 A JP50020659 A JP 50020659A JP 2065975 A JP2065975 A JP 2065975A JP S5194111 A JPS5194111 A JP S5194111A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50020659A
Other languages
Japanese (ja)
Other versions
JPS6024578B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2065975A priority Critical patent/JPS6024578B2/ja
Publication of JPS5194111A publication Critical patent/JPS5194111A/ja
Publication of JPS6024578B2 publication Critical patent/JPS6024578B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2065975A 1975-02-18 1975-02-18 スパツタ装置 Expired JPS6024578B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2065975A JPS6024578B2 (ja) 1975-02-18 1975-02-18 スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2065975A JPS6024578B2 (ja) 1975-02-18 1975-02-18 スパツタ装置

Publications (2)

Publication Number Publication Date
JPS5194111A true JPS5194111A (enrdf_load_stackoverflow) 1976-08-18
JPS6024578B2 JPS6024578B2 (ja) 1985-06-13

Family

ID=12033328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2065975A Expired JPS6024578B2 (ja) 1975-02-18 1975-02-18 スパツタ装置

Country Status (1)

Country Link
JP (1) JPS6024578B2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6024578B2 (ja) 1985-06-13

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