JPS60242050A - 透明導電性フイルムの製造方法 - Google Patents
透明導電性フイルムの製造方法Info
- Publication number
- JPS60242050A JPS60242050A JP9756484A JP9756484A JPS60242050A JP S60242050 A JPS60242050 A JP S60242050A JP 9756484 A JP9756484 A JP 9756484A JP 9756484 A JP9756484 A JP 9756484A JP S60242050 A JPS60242050 A JP S60242050A
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- film
- transparent conductive
- manufacture
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010408 film Substances 0.000 claims description 41
- 229920006254 polymer film Polymers 0.000 claims description 7
- 238000006116 polymerization reaction Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 9
- 239000000178 monomer Substances 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- HEQWUWZWGPCGCD-UHFFFAOYSA-N cadmium(2+) oxygen(2-) tin(4+) Chemical compound [O--].[O--].[O--].[Cd++].[Sn+4] HEQWUWZWGPCGCD-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9756484A JPS60242050A (ja) | 1984-05-17 | 1984-05-17 | 透明導電性フイルムの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9756484A JPS60242050A (ja) | 1984-05-17 | 1984-05-17 | 透明導電性フイルムの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60242050A true JPS60242050A (ja) | 1985-12-02 |
| JPS6332620B2 JPS6332620B2 (enrdf_load_stackoverflow) | 1988-06-30 |
Family
ID=14195725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9756484A Granted JPS60242050A (ja) | 1984-05-17 | 1984-05-17 | 透明導電性フイルムの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60242050A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01279745A (ja) * | 1988-05-02 | 1989-11-10 | Orient Watch Co Ltd | 複合多層膜 |
| JPH01279744A (ja) * | 1988-05-02 | 1989-11-10 | Orient Watch Co Ltd | 複合混合多層膜 |
-
1984
- 1984-05-17 JP JP9756484A patent/JPS60242050A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01279745A (ja) * | 1988-05-02 | 1989-11-10 | Orient Watch Co Ltd | 複合多層膜 |
| JPH01279744A (ja) * | 1988-05-02 | 1989-11-10 | Orient Watch Co Ltd | 複合混合多層膜 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332620B2 (enrdf_load_stackoverflow) | 1988-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4086132B2 (ja) | 透明導電性フィルムおよびタッチパネル | |
| JP2007200823A (ja) | 結晶性透明導電性薄膜、その製造方法、透明導電性フィルムおよびタッチパネル | |
| AU2001255383B2 (en) | Etching process for making electrodes | |
| JPH02129808A (ja) | 透明導電性積層体 | |
| AU2001255383A1 (en) | Etching process for making electrodes | |
| JPH06136159A (ja) | 透明導電性フィルムおよびその製造法 | |
| JPH09314729A (ja) | 透明導電性フィルムおよびその製造法 | |
| JPS60242050A (ja) | 透明導電性フイルムの製造方法 | |
| CN110088714B (zh) | 带载体薄膜的透明导电性薄膜及使用其的触摸面板 | |
| JP4517255B2 (ja) | タッチパネル用透明導電性フィルム、タッチパネル用透明導電性シートおよびタッチパネル | |
| JP2624930B2 (ja) | 透明導電性積層体とタツチパネル | |
| JP3489844B2 (ja) | 透明導電性フィルムおよびその製造方法 | |
| JPH0391795A (ja) | 加工物品 | |
| JPH0348605B2 (enrdf_load_stackoverflow) | ||
| JPS63269415A (ja) | 透明複合導電体の製造方法 | |
| JP2003139902A (ja) | 合成樹脂上への薄膜形成方法と得られた積層膜 | |
| JPS62154413A (ja) | 凹凸面を有する透明電極化樹脂の製造方法 | |
| JPS60203432A (ja) | 透明導電性フイルムの製造方法 | |
| JPH0345485B2 (enrdf_load_stackoverflow) | ||
| JP2000302988A (ja) | 樹脂組成物および光学フィルム | |
| JPS60217147A (ja) | 透明導電性フイルムの製造方法 | |
| JPH04237185A (ja) | フレキシブルプリント基板の製造方法 | |
| JP2003151360A (ja) | 透明導電性フィルムおよびタッチパネル | |
| JPS58208039A (ja) | 導電性積層体 | |
| JP2003151359A (ja) | 透明導電性フィルムおよびタッチパネル |