JPS6024037A - ポリイミド系樹脂膜の形成方法 - Google Patents

ポリイミド系樹脂膜の形成方法

Info

Publication number
JPS6024037A
JPS6024037A JP58131044A JP13104483A JPS6024037A JP S6024037 A JPS6024037 A JP S6024037A JP 58131044 A JP58131044 A JP 58131044A JP 13104483 A JP13104483 A JP 13104483A JP S6024037 A JPS6024037 A JP S6024037A
Authority
JP
Japan
Prior art keywords
resin film
film
polyimide resin
heat
photosensitive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58131044A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220138B2 (enExample
Inventor
Shinichi Hara
原　眞一
Masanobu Hanazono
雅信 華園
Shinji Narushige
成重　真治
Tsuneo Yoshinari
吉成　恒男
Mitsuo Sato
佐藤　満雄
Makoto Morijiri
誠 森尻
Katsuya Mitsuoka
光岡　勝也
Harunobu Saito
斉藤　治信
Shunichiro Kuwazuka
鍬塚　俊一郎
Masaaki Hayashi
林　将章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Computer Basic Technology Research Association Corp
Original Assignee
Computer Basic Technology Research Association Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Computer Basic Technology Research Association Corp filed Critical Computer Basic Technology Research Association Corp
Priority to JP58131044A priority Critical patent/JPS6024037A/ja
Publication of JPS6024037A publication Critical patent/JPS6024037A/ja
Publication of JPH0220138B2 publication Critical patent/JPH0220138B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP58131044A 1983-07-20 1983-07-20 ポリイミド系樹脂膜の形成方法 Granted JPS6024037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58131044A JPS6024037A (ja) 1983-07-20 1983-07-20 ポリイミド系樹脂膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58131044A JPS6024037A (ja) 1983-07-20 1983-07-20 ポリイミド系樹脂膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6024037A true JPS6024037A (ja) 1985-02-06
JPH0220138B2 JPH0220138B2 (enExample) 1990-05-08

Family

ID=15048702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58131044A Granted JPS6024037A (ja) 1983-07-20 1983-07-20 ポリイミド系樹脂膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6024037A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219928A (ja) * 1986-03-20 1987-09-28 Fujitsu Ltd 絶縁膜の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219928A (ja) * 1986-03-20 1987-09-28 Fujitsu Ltd 絶縁膜の形成方法

Also Published As

Publication number Publication date
JPH0220138B2 (enExample) 1990-05-08

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