JPS6022750U - scanning electron microscope - Google Patents

scanning electron microscope

Info

Publication number
JPS6022750U
JPS6022750U JP11427383U JP11427383U JPS6022750U JP S6022750 U JPS6022750 U JP S6022750U JP 11427383 U JP11427383 U JP 11427383U JP 11427383 U JP11427383 U JP 11427383U JP S6022750 U JPS6022750 U JP S6022750U
Authority
JP
Japan
Prior art keywords
accelerating voltage
electron microscope
scanning electron
specified
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11427383U
Other languages
Japanese (ja)
Inventor
神田　公生
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP11427383U priority Critical patent/JPS6022750U/en
Publication of JPS6022750U publication Critical patent/JPS6022750U/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の動作原理を説明する路線図、第２図を
本考案の効果を説明する図である。 ８・・・高電圧発生回路、９・・・外部制御回路、１゜
・・・対物レンズ電源、１１・・・自動焦点合せ制御回
路、１２・・・増幅器、１４・・・収束レンズ電源、１
５・・・偏向電源、１６・・・自動画調調整回路。FIG. 1 is a route map for explaining the operating principle of the present invention, and FIG. 2 is a diagram for explaining the effects of the present invention. 8... High voltage generation circuit, 9... External control circuit, 1°... Objective lens power supply, 11... Automatic focusing control circuit, 12... Amplifier, 14... Converging lens power supply, 1
5... Deflection power supply, 16... Automatic adjustment circuit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] １．　電子銃への加速電圧を変化させ得る走査電子顕微
鏡において、予め指定された加速電圧範囲を加速電圧が
予め指定された時間及び段階で自動可変する機能を有す
ることを特徴とする走査電子顕微鏡。 ２、　実用新案登録請求の範囲第１項において、自動焦
点合せを行ないながら予め指定された加速電圧範囲を加
速電圧が予め指定された時間及び段階で自動可変する機
能を有することを特徴とする走査電子顕微鏡。 ３、　実用新案登録請求の範囲第１項において、自動焦
点合せ及び自動画調調整を行ないながら予め指定された
加速電圧範囲を加速電圧が予め指定された時間及び段階
で自動可変する機能を有することを特徴とする走査電子
顕微鏡。1. A scanning electron microscope capable of changing the accelerating voltage applied to an electron gun, characterized in that the scanning electron microscope has a function of automatically varying the accelerating voltage within a pre-specified accelerating voltage range at pre-specified times and steps. 2. Utility model registration Claims Paragraph 1 provides a scanning device characterized by having a function of automatically varying the accelerating voltage within a pre-specified accelerating voltage range at pre-specified times and steps while performing automatic focusing. electronic microscope. 3. Claim 1 of the utility model registration claim has the function of automatically varying the accelerating voltage within a pre-specified accelerating voltage range at pre-specified times and stages while performing automatic focusing and automatic video adjustment. A scanning electron microscope featuring:
JP11427383U 1983-07-25 1983-07-25 scanning electron microscope Pending JPS6022750U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11427383U JPS6022750U (en) 1983-07-25 1983-07-25 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11427383U JPS6022750U (en) 1983-07-25 1983-07-25 scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS6022750U true JPS6022750U (en) 1985-02-16

Family

ID=30264214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11427383U Pending JPS6022750U (en) 1983-07-25 1983-07-25 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS6022750U (en)

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