JPS6022750U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS6022750U JPS6022750U JP11427383U JP11427383U JPS6022750U JP S6022750 U JPS6022750 U JP S6022750U JP 11427383 U JP11427383 U JP 11427383U JP 11427383 U JP11427383 U JP 11427383U JP S6022750 U JPS6022750 U JP S6022750U
- Authority
- JP
- Japan
- Prior art keywords
- accelerating voltage
- electron microscope
- scanning electron
- specified
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の動作原理を説明する路線図、第２図を
本考案の効果を説明する図である。
８・・・高電圧発生回路、９・・・外部制御回路、１゜
・・・対物レンズ電源、１１・・・自動焦点合せ制御回
路、１２・・・増幅器、１４・・・収束レンズ電源、１
５・・・偏向電源、１６・・・自動画調調整回路。FIG. 1 is a route map for explaining the operating principle of the present invention, and FIG. 2 is a diagram for explaining the effects of the present invention. 8... High voltage generation circuit, 9... External control circuit, 1°... Objective lens power supply, 11... Automatic focusing control circuit, 12... Amplifier, 14... Converging lens power supply, 1
5... Deflection power supply, 16... Automatic adjustment circuit.
Claims (1)
鏡において、予め指定された加速電圧範囲を加速電圧が
予め指定された時間及び段階で自動可変する機能を有す
ることを特徴とする走査電子顕微鏡。 ２、 実用新案登録請求の範囲第１項において、自動焦
点合せを行ないながら予め指定された加速電圧範囲を加
速電圧が予め指定された時間及び段階で自動可変する機
能を有することを特徴とする走査電子顕微鏡。 ３、 実用新案登録請求の範囲第１項において、自動焦
点合せ及び自動画調調整を行ないながら予め指定された
加速電圧範囲を加速電圧が予め指定された時間及び段階
で自動可変する機能を有することを特徴とする走査電子
顕微鏡。1. A scanning electron microscope capable of changing the accelerating voltage applied to an electron gun, characterized in that the scanning electron microscope has a function of automatically varying the accelerating voltage within a pre-specified accelerating voltage range at pre-specified times and steps. 2. Utility model registration Claims Paragraph 1 provides a scanning device characterized by having a function of automatically varying the accelerating voltage within a pre-specified accelerating voltage range at pre-specified times and steps while performing automatic focusing. electronic microscope. 3. Claim 1 of the utility model registration claim has the function of automatically varying the accelerating voltage within a pre-specified accelerating voltage range at pre-specified times and stages while performing automatic focusing and automatic video adjustment. A scanning electron microscope featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427383U JPS6022750U (en) | 1983-07-25 | 1983-07-25 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427383U JPS6022750U (en) | 1983-07-25 | 1983-07-25 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6022750U true JPS6022750U (en) | 1985-02-16 |
Family
ID=30264214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11427383U Pending JPS6022750U (en) | 1983-07-25 | 1983-07-25 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022750U (en) |
-
1983
- 1983-07-25 JP JP11427383U patent/JPS6022750U/en active Pending
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