JPS58174852U - Scanning electron microscope axis adjustment device - Google Patents
Scanning electron microscope axis adjustment deviceInfo
- Publication number
- JPS58174852U JPS58174852U JP7072682U JP7072682U JPS58174852U JP S58174852 U JPS58174852 U JP S58174852U JP 7072682 U JP7072682 U JP 7072682U JP 7072682 U JP7072682 U JP 7072682U JP S58174852 U JPS58174852 U JP S58174852U
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- axis adjustment
- scanning electron
- adjustment device
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す図、第２図は本考案の
表示例を示す図である。
１・・・電子線源、２・・・電子ビーム、３・・・試料
、４・・・収束レンズ、５・・・二次電子、６・・・二
次電子検出器、７・・・像信号増巾器、８・・・ＣＲＴ
、 ９・・・軸調整Ｘコイル、１０・・・軸調整Ｙコイ
ル、１１・・・ＣＲＴ用Ｘコイル、１２・・・ＣＲＴ用
Ｙコイル、１３・・・軸調整駆動回路Ｘ１１４・・・加
算回路Ｘ１１５・・・ポテンシオメータＸ１１６・・・
軸調整駆動回路Ｙ１１７・・・加算回路Ｙ１１８・・・
ポテンシオメータＹ１１９・・・スイッチＸ１２０・二
・スイッチＹ１２１・・・ＣＲＴ駆動回路Ｘ１２２・・
・ＣＲＴ駆動回路Ｙ１２３・・・鋸歯状波発生回路。FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing a display example of the present invention. DESCRIPTION OF SYMBOLS 1... Electron beam source, 2... Electron beam, 3... Sample, 4... Converging lens, 5... Secondary electron, 6... Secondary electron detector, 7... Image signal amplifier, 8...CRT
, 9... Axis adjustment X coil, 10... Axis adjustment Y coil, 11... X coil for CRT, 12... Y coil for CRT, 13... Axis adjustment drive circuit X114... Addition Circuit X115... Potentiometer X116...
Axis adjustment drive circuit Y117...addition circuit Y118...
Potentiometer Y119...Switch X120.2 Switch Y121...CRT drive circuit X122...
- CRT drive circuit Y123... sawtooth wave generation circuit.
Claims (1)
の電子ビームのレンズ系に入射される位置又は角度を調
整するための静電偏向又は電磁偏向を用いた電子ビーム
偏向器に、直流信号および試料からの信号を像表示する
為のＣＲＴ等を用いた表示器の電子線等の走査に同期し
たところの交流信号を加え、該表示器上の所定の位置に
おける試料からの信号が最も大きくなる様に、該直流信
号の大きさを調整することを特徴とする走査電子顕微鏡
の軸調整装置。In a scanning electron microscope or similar device, a DC signal and a sample are sent to an electron beam deflector that uses electrostatic or electromagnetic deflection to adjust the position or angle at which the electron beam from the electron gun enters the lens system. An alternating current signal synchronized with the scanning of an electron beam or the like on a display using a CRT or the like for image display is added, and the signal from the sample at a predetermined position on the display is maximized. An axis adjustment device for a scanning electron microscope, characterized in that the magnitude of the DC signal is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7072682U JPS58174852U (en) | 1982-05-17 | 1982-05-17 | Scanning electron microscope axis adjustment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7072682U JPS58174852U (en) | 1982-05-17 | 1982-05-17 | Scanning electron microscope axis adjustment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58174852U true JPS58174852U (en) | 1983-11-22 |
Family
ID=30080381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7072682U Pending JPS58174852U (en) | 1982-05-17 | 1982-05-17 | Scanning electron microscope axis adjustment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58174852U (en) |
-
1982
- 1982-05-17 JP JP7072682U patent/JPS58174852U/en active Pending
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