JPS60224248A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60224248A
JPS60224248A JP59080049A JP8004984A JPS60224248A JP S60224248 A JPS60224248 A JP S60224248A JP 59080049 A JP59080049 A JP 59080049A JP 8004984 A JP8004984 A JP 8004984A JP S60224248 A JPS60224248 A JP S60224248A
Authority
JP
Japan
Prior art keywords
layer
plating
plated
bump
tin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59080049A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129064B2 (enExample
Inventor
Norio Totsuka
戸塚　憲男
Yasumitsu Sugawara
菅原　安光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP59080049A priority Critical patent/JPS60224248A/ja
Publication of JPS60224248A publication Critical patent/JPS60224248A/ja
Publication of JPH0129064B2 publication Critical patent/JPH0129064B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01029—Copper [Cu]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
JP59080049A 1984-04-23 1984-04-23 半導体装置の製造方法 Granted JPS60224248A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59080049A JPS60224248A (ja) 1984-04-23 1984-04-23 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59080049A JPS60224248A (ja) 1984-04-23 1984-04-23 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60224248A true JPS60224248A (ja) 1985-11-08
JPH0129064B2 JPH0129064B2 (enExample) 1989-06-07

Family

ID=13707382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59080049A Granted JPS60224248A (ja) 1984-04-23 1984-04-23 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60224248A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997003465A1 (fr) * 1995-07-12 1997-01-30 Hitachi, Ltd. Puce semi-conductrice, son procede de conditionnement et electrode a bosse

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847273A (enExample) * 1971-10-15 1973-07-05
JPS51117574A (en) * 1975-04-08 1976-10-15 Seiko Epson Corp Semiconductor equipment
JPS5524414A (en) * 1978-08-09 1980-02-21 Hitachi Ltd Electrode forming process

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847273A (enExample) * 1971-10-15 1973-07-05
JPS51117574A (en) * 1975-04-08 1976-10-15 Seiko Epson Corp Semiconductor equipment
JPS5524414A (en) * 1978-08-09 1980-02-21 Hitachi Ltd Electrode forming process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997003465A1 (fr) * 1995-07-12 1997-01-30 Hitachi, Ltd. Puce semi-conductrice, son procede de conditionnement et electrode a bosse

Also Published As

Publication number Publication date
JPH0129064B2 (enExample) 1989-06-07

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