JPS6022352Y2 - 過密着防止用マスク - Google Patents

過密着防止用マスク

Info

Publication number
JPS6022352Y2
JPS6022352Y2 JP1979015792U JP1579279U JPS6022352Y2 JP S6022352 Y2 JPS6022352 Y2 JP S6022352Y2 JP 1979015792 U JP1979015792 U JP 1979015792U JP 1579279 U JP1579279 U JP 1579279U JP S6022352 Y2 JPS6022352 Y2 JP S6022352Y2
Authority
JP
Japan
Prior art keywords
mask
substrate
processed
hole
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979015792U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55116345U (enExample
Inventor
真也 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1979015792U priority Critical patent/JPS6022352Y2/ja
Publication of JPS55116345U publication Critical patent/JPS55116345U/ja
Application granted granted Critical
Publication of JPS6022352Y2 publication Critical patent/JPS6022352Y2/ja
Expired legal-status Critical Current

Links

JP1979015792U 1979-02-09 1979-02-09 過密着防止用マスク Expired JPS6022352Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979015792U JPS6022352Y2 (ja) 1979-02-09 1979-02-09 過密着防止用マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979015792U JPS6022352Y2 (ja) 1979-02-09 1979-02-09 過密着防止用マスク

Publications (2)

Publication Number Publication Date
JPS55116345U JPS55116345U (enExample) 1980-08-16
JPS6022352Y2 true JPS6022352Y2 (ja) 1985-07-03

Family

ID=28838126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979015792U Expired JPS6022352Y2 (ja) 1979-02-09 1979-02-09 過密着防止用マスク

Country Status (1)

Country Link
JP (1) JPS6022352Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7005730B2 (en) 2002-02-19 2006-02-28 Matrix Semiconductor, Inc. Memory module having interconnected and stacked integrated circuits
US8897056B2 (en) 1998-11-16 2014-11-25 Sandisk 3D Llc Pillar-shaped nonvolatile memory and method of fabrication

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8897056B2 (en) 1998-11-16 2014-11-25 Sandisk 3D Llc Pillar-shaped nonvolatile memory and method of fabrication
US9214243B2 (en) 1998-11-16 2015-12-15 Sandisk 3D Llc Three-dimensional nonvolatile memory and method of fabrication
US7005730B2 (en) 2002-02-19 2006-02-28 Matrix Semiconductor, Inc. Memory module having interconnected and stacked integrated circuits
US7432599B2 (en) 2002-02-19 2008-10-07 Sandisk 3D Llc Memory module having interconnected and stacked integrated circuits

Also Published As

Publication number Publication date
JPS55116345U (enExample) 1980-08-16

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