JPS60213473A - 研磨装置 - Google Patents
研磨装置Info
- Publication number
- JPS60213473A JPS60213473A JP6725884A JP6725884A JPS60213473A JP S60213473 A JPS60213473 A JP S60213473A JP 6725884 A JP6725884 A JP 6725884A JP 6725884 A JP6725884 A JP 6725884A JP S60213473 A JPS60213473 A JP S60213473A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- belt
- polishing
- abrasive belt
- polishing belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 69
- 239000007788 liquid Substances 0.000 claims abstract description 75
- 238000002347 injection Methods 0.000 claims abstract description 17
- 239000007924 injection Substances 0.000 claims abstract description 17
- 238000004140 cleaning Methods 0.000 claims description 71
- 238000005507 spraying Methods 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 3
- 238000005406 washing Methods 0.000 abstract description 11
- 239000006061 abrasive grain Substances 0.000 abstract description 4
- 238000011084 recovery Methods 0.000 abstract 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6725884A JPS60213473A (ja) | 1984-04-03 | 1984-04-03 | 研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6725884A JPS60213473A (ja) | 1984-04-03 | 1984-04-03 | 研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60213473A true JPS60213473A (ja) | 1985-10-25 |
| JPH0513784B2 JPH0513784B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-23 |
Family
ID=13339742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6725884A Granted JPS60213473A (ja) | 1984-04-03 | 1984-04-03 | 研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60213473A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57201172A (en) * | 1981-06-02 | 1982-12-09 | Meinan Mach Works Inc | Polishing device |
-
1984
- 1984-04-03 JP JP6725884A patent/JPS60213473A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57201172A (en) * | 1981-06-02 | 1982-12-09 | Meinan Mach Works Inc | Polishing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513784B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-23 |