JPS60204698A - 半導体結晶成長方法 - Google Patents
半導体結晶成長方法Info
- Publication number
- JPS60204698A JPS60204698A JP59060202A JP6020284A JPS60204698A JP S60204698 A JPS60204698 A JP S60204698A JP 59060202 A JP59060202 A JP 59060202A JP 6020284 A JP6020284 A JP 6020284A JP S60204698 A JPS60204698 A JP S60204698A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- substrate temperature
- substrate
- zns
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 32
- 239000004065 semiconductor Substances 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000002994 raw material Substances 0.000 claims abstract description 13
- 150000001875 compounds Chemical class 0.000 claims abstract description 6
- 238000002109 crystal growth method Methods 0.000 claims 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 7
- 238000009792 diffusion process Methods 0.000 abstract description 5
- 238000001947 vapour-phase growth Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000295 emission spectrum Methods 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 241000269821 Scombridae Species 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 235000020640 mackerel Nutrition 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- ORFSSYGWXNGVFB-UHFFFAOYSA-N sodium 4-amino-6-[[4-[4-[(8-amino-1-hydroxy-5,7-disulfonaphthalen-2-yl)diazenyl]-3-methoxyphenyl]-2-methoxyphenyl]diazenyl]-5-hydroxynaphthalene-1,3-disulfonic acid Chemical compound COC1=C(C=CC(=C1)C2=CC(=C(C=C2)N=NC3=C(C4=C(C=C3)C(=CC(=C4N)S(=O)(=O)O)S(=O)(=O)O)O)OC)N=NC5=C(C6=C(C=C5)C(=CC(=C6N)S(=O)(=O)O)S(=O)(=O)O)O.[Na+] ORFSSYGWXNGVFB-UHFFFAOYSA-N 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59060202A JPS60204698A (ja) | 1984-03-28 | 1984-03-28 | 半導体結晶成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59060202A JPS60204698A (ja) | 1984-03-28 | 1984-03-28 | 半導体結晶成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60204698A true JPS60204698A (ja) | 1985-10-16 |
| JPH0211560B2 JPH0211560B2 (enrdf_load_stackoverflow) | 1990-03-14 |
Family
ID=13135326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59060202A Granted JPS60204698A (ja) | 1984-03-28 | 1984-03-28 | 半導体結晶成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60204698A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62119193A (ja) * | 1985-11-15 | 1987-05-30 | Matsushita Electric Ind Co Ltd | 半導体の製造方法 |
| JPS62163310A (ja) * | 1986-01-14 | 1987-07-20 | Toshiba Corp | 化合物半導体結晶の製造方法 |
-
1984
- 1984-03-28 JP JP59060202A patent/JPS60204698A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62119193A (ja) * | 1985-11-15 | 1987-05-30 | Matsushita Electric Ind Co Ltd | 半導体の製造方法 |
| JPS62163310A (ja) * | 1986-01-14 | 1987-07-20 | Toshiba Corp | 化合物半導体結晶の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0211560B2 (enrdf_load_stackoverflow) | 1990-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2564024B2 (ja) | 化合物半導体発光素子 | |
| US4868615A (en) | Semiconductor light emitting device using group I and group VII dopants | |
| JPS6057214B2 (ja) | 電気発光物質の製法 | |
| Kukimoto | Conductivity control of ZnSe grown by MOVPE and its application for blue electroluminescence | |
| US4252576A (en) | Epitaxial wafer for use in production of light emitting diode | |
| US5442201A (en) | Semiconductor light emitting device with nitrogen doping | |
| JP3458007B2 (ja) | 半導体発光素子 | |
| JPH02257678A (ja) | 窒化ガリウム系化合物半導体発光素子の作製方法 | |
| JPS60204698A (ja) | 半導体結晶成長方法 | |
| JPS5846686A (ja) | 青色発光素子 | |
| JPS60111482A (ja) | 発光ダイオードの製造方法 | |
| JP2817577B2 (ja) | ＧａＰ純緑色発光素子基板 | |
| JPH0964419A (ja) | ３−５族化合物半導体及び発光素子 | |
| JPH0463040B2 (enrdf_load_stackoverflow) | ||
| JPH09148626A (ja) | ３−５族化合物半導体の製造方法 | |
| JPH0220077A (ja) | 緑色発光ダイオードの製造方法 | |
| JP2579336B2 (ja) | 青色発光ダイオードの製造方法 | |
| JP2004200723A (ja) | ３−５族化合物半導体の結晶性向上方法 | |
| JPH04328823A (ja) | 発光ダイオ−ド用エピタキシャルウエハの製造方法 | |
| JPS63160344A (ja) | ＺｎＳｘＳｅ↓１−ｘ（０≦ｘ≦１）結晶の製造方法 | |
| JP2783580B2 (ja) | ダブルヘテロ型赤外光発光素子 | |
| JPH0728053B2 (ja) | 発光ダイオ−ド | |
| JP2545212B2 (ja) | 青色発光素子 | |
| JPS6118184A (ja) | 発光素子 | |
| JPS6074444A (ja) | 半導体結晶の成長方法 |