JPS60200888A - 赤外線加熱結晶製造における溶融帯径の制御方法 - Google Patents
赤外線加熱結晶製造における溶融帯径の制御方法Info
- Publication number
- JPS60200888A JPS60200888A JP5559784A JP5559784A JPS60200888A JP S60200888 A JPS60200888 A JP S60200888A JP 5559784 A JP5559784 A JP 5559784A JP 5559784 A JP5559784 A JP 5559784A JP S60200888 A JPS60200888 A JP S60200888A
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- zone
- melted zone
- melted
- timing pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 42
- 238000010438 heat treatment Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 15
- 238000002360 preparation method Methods 0.000 title 1
- 230000005611 electricity Effects 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 claims description 31
- 238000004364 calculation method Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 abstract description 30
- 230000008018 melting Effects 0.000 abstract description 30
- 229910052736 halogen Inorganic materials 0.000 description 21
- 150000002367 halogens Chemical class 0.000 description 21
- 238000010586 diagram Methods 0.000 description 8
- 239000000155 melt Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007917 intracranial administration Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5559784A JPS60200888A (ja) | 1984-03-22 | 1984-03-22 | 赤外線加熱結晶製造における溶融帯径の制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5559784A JPS60200888A (ja) | 1984-03-22 | 1984-03-22 | 赤外線加熱結晶製造における溶融帯径の制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60200888A true JPS60200888A (ja) | 1985-10-11 |
| JPH0148240B2 JPH0148240B2 (enrdf_load_stackoverflow) | 1989-10-18 |
Family
ID=13003177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5559784A Granted JPS60200888A (ja) | 1984-03-22 | 1984-03-22 | 赤外線加熱結晶製造における溶融帯径の制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60200888A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103160932A (zh) * | 2011-12-18 | 2013-06-19 | 洛阳金诺机械工程有限公司 | 一种加工晶体材料时对坩埚的均匀加热装置及其方法 |
-
1984
- 1984-03-22 JP JP5559784A patent/JPS60200888A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103160932A (zh) * | 2011-12-18 | 2013-06-19 | 洛阳金诺机械工程有限公司 | 一种加工晶体材料时对坩埚的均匀加热装置及其方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0148240B2 (enrdf_load_stackoverflow) | 1989-10-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4794263A (en) | Apparatus for measuring crystal diameter | |
| JP4602561B2 (ja) | 育成プロセス中のシリコン結晶に係る径を制御するための方法及び装置 | |
| JPH04149092A (ja) | コーン部育成制御方法及び装置 | |
| JPH0717475B2 (ja) | 単結晶ネック部育成自動制御方法 | |
| JPS63242991A (ja) | 結晶径制御方法 | |
| JPS60200888A (ja) | 赤外線加熱結晶製造における溶融帯径の制御方法 | |
| JPS60200889A (ja) | 赤外線加熱結晶製造装置における溶融帯径の制御装置 | |
| JPH0343237B2 (enrdf_load_stackoverflow) | ||
| TWI785410B (zh) | 單結晶製造系統及單結晶製造方法 | |
| JP3592909B2 (ja) | 単結晶引上装置 | |
| JPS60112688A (ja) | 赤外線加熱単結晶製造装置の溶融帯部の溶融状況制御方法 | |
| JPS6027686A (ja) | 単結晶製造装置 | |
| DK141784B (da) | Fremgangsmaade og apparat til digelfri zonesmeltning af en halvlederstav | |
| JPS6071589A (ja) | 単結晶の製造方法 | |
| TWI850312B (zh) | 從熔體中提拉圓柱形晶體之方法 | |
| JPH06316484A (ja) | Ｃｚ法における融液レベル制御装置 | |
| Gold | The plasmascope-a new opto-electronic method for velocity measurements in thermal plasmas | |
| JPS60103095A (ja) | 単結晶の製造方法 | |
| JPS6071592A (ja) | 単結晶の製造方法 | |
| JP3655355B2 (ja) | 半導体単結晶製造工程における最適溶融液温度の検知方法 | |
| JPH03215382A (ja) | 結晶製造装置 | |
| JPS63270382A (ja) | 半導体棒浮遊熔融帯域制御方法 | |
| JPH07172993A (ja) | ルチル単結晶の製造方法 | |
| JPS63291892A (ja) | 単結晶の製造方法 | |
| JPS5926996A (ja) | 単結晶の製造方法 |