JPS60186479A - 高熱伝導性窒化アルミニウム焼結体の製造方法 - Google Patents

高熱伝導性窒化アルミニウム焼結体の製造方法

Info

Publication number
JPS60186479A
JPS60186479A JP59041908A JP4190884A JPS60186479A JP S60186479 A JPS60186479 A JP S60186479A JP 59041908 A JP59041908 A JP 59041908A JP 4190884 A JP4190884 A JP 4190884A JP S60186479 A JPS60186479 A JP S60186479A
Authority
JP
Japan
Prior art keywords
aluminum nitride
sintered body
carbon
nitride sintered
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59041908A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0567593B2 (enrdf_load_stackoverflow
Inventor
安斎　和雄
加曽利　光男
高野　武士
和夫 篠崎
柘植　章彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59041908A priority Critical patent/JPS60186479A/ja
Publication of JPS60186479A publication Critical patent/JPS60186479A/ja
Publication of JPH0567593B2 publication Critical patent/JPH0567593B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP59041908A 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法 Granted JPS60186479A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59041908A JPS60186479A (ja) 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59041908A JPS60186479A (ja) 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS60186479A true JPS60186479A (ja) 1985-09-21
JPH0567593B2 JPH0567593B2 (enrdf_load_stackoverflow) 1993-09-27

Family

ID=12621376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59041908A Granted JPS60186479A (ja) 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS60186479A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242468A (ja) * 1988-03-23 1989-09-27 Japan Steel Works Ltd:The 窒化アルミニウム焼結体の製造方法
JPH042663A (ja) * 1990-04-17 1992-01-07 Sumitomo Electric Ind Ltd 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
WO2001047831A1 (fr) * 1999-12-28 2001-07-05 Ibiden Co., Ltd. Produit fritte a base de nitrure d'aluminium contenant du carbone et substrat ceramique utilise dans la production et la verification de semi-conducteur
US6719931B2 (en) 2000-01-10 2004-04-13 Basf Aktiengesellschaft Low-viscosity, melamine-formaldehyde resin microcapsule dispersions with reduced formaldehyde content
US6900149B1 (en) 1999-09-06 2005-05-31 Ibiden Co., Ltd. Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242468A (ja) * 1988-03-23 1989-09-27 Japan Steel Works Ltd:The 窒化アルミニウム焼結体の製造方法
JPH042663A (ja) * 1990-04-17 1992-01-07 Sumitomo Electric Ind Ltd 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
US6900149B1 (en) 1999-09-06 2005-05-31 Ibiden Co., Ltd. Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor
US6964812B2 (en) 1999-09-06 2005-11-15 Ibiden Co., Ltd. Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor
US7015166B2 (en) 1999-09-06 2006-03-21 Ibiden Co., Ltd. Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor
WO2001047831A1 (fr) * 1999-12-28 2001-07-05 Ibiden Co., Ltd. Produit fritte a base de nitrure d'aluminium contenant du carbone et substrat ceramique utilise dans la production et la verification de semi-conducteur
US6719931B2 (en) 2000-01-10 2004-04-13 Basf Aktiengesellschaft Low-viscosity, melamine-formaldehyde resin microcapsule dispersions with reduced formaldehyde content

Also Published As

Publication number Publication date
JPH0567593B2 (enrdf_load_stackoverflow) 1993-09-27

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