JPS60186479A - 高熱伝導性窒化アルミニウム焼結体の製造方法 - Google Patents
高熱伝導性窒化アルミニウム焼結体の製造方法Info
- Publication number
- JPS60186479A JPS60186479A JP59041908A JP4190884A JPS60186479A JP S60186479 A JPS60186479 A JP S60186479A JP 59041908 A JP59041908 A JP 59041908A JP 4190884 A JP4190884 A JP 4190884A JP S60186479 A JPS60186479 A JP S60186479A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- sintered body
- carbon
- nitride sintered
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 17
- 229910052799 carbon Inorganic materials 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 12
- 238000005245 sintering Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000011812 mixed powder Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 208000031872 Body Remains Diseases 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000007580 dry-mixing Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59041908A JPS60186479A (ja) | 1984-03-07 | 1984-03-07 | 高熱伝導性窒化アルミニウム焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59041908A JPS60186479A (ja) | 1984-03-07 | 1984-03-07 | 高熱伝導性窒化アルミニウム焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60186479A true JPS60186479A (ja) | 1985-09-21 |
| JPH0567593B2 JPH0567593B2 (enrdf_load_stackoverflow) | 1993-09-27 |
Family
ID=12621376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59041908A Granted JPS60186479A (ja) | 1984-03-07 | 1984-03-07 | 高熱伝導性窒化アルミニウム焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60186479A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01242468A (ja) * | 1988-03-23 | 1989-09-27 | Japan Steel Works Ltd:The | 窒化アルミニウム焼結体の製造方法 |
| JPH042663A (ja) * | 1990-04-17 | 1992-01-07 | Sumitomo Electric Ind Ltd | 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法 |
| WO2001047831A1 (fr) * | 1999-12-28 | 2001-07-05 | Ibiden Co., Ltd. | Produit fritte a base de nitrure d'aluminium contenant du carbone et substrat ceramique utilise dans la production et la verification de semi-conducteur |
| US6719931B2 (en) | 2000-01-10 | 2004-04-13 | Basf Aktiengesellschaft | Low-viscosity, melamine-formaldehyde resin microcapsule dispersions with reduced formaldehyde content |
| US6900149B1 (en) | 1999-09-06 | 2005-05-31 | Ibiden Co., Ltd. | Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor |
-
1984
- 1984-03-07 JP JP59041908A patent/JPS60186479A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01242468A (ja) * | 1988-03-23 | 1989-09-27 | Japan Steel Works Ltd:The | 窒化アルミニウム焼結体の製造方法 |
| JPH042663A (ja) * | 1990-04-17 | 1992-01-07 | Sumitomo Electric Ind Ltd | 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法 |
| US6900149B1 (en) | 1999-09-06 | 2005-05-31 | Ibiden Co., Ltd. | Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor |
| US6964812B2 (en) | 1999-09-06 | 2005-11-15 | Ibiden Co., Ltd. | Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor |
| US7015166B2 (en) | 1999-09-06 | 2006-03-21 | Ibiden Co., Ltd. | Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor |
| WO2001047831A1 (fr) * | 1999-12-28 | 2001-07-05 | Ibiden Co., Ltd. | Produit fritte a base de nitrure d'aluminium contenant du carbone et substrat ceramique utilise dans la production et la verification de semi-conducteur |
| US6719931B2 (en) | 2000-01-10 | 2004-04-13 | Basf Aktiengesellschaft | Low-viscosity, melamine-formaldehyde resin microcapsule dispersions with reduced formaldehyde content |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0567593B2 (enrdf_load_stackoverflow) | 1993-09-27 |
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