JPS60180911A - 高純度シリカおよびその製造法 - Google Patents
高純度シリカおよびその製造法Info
- Publication number
 - JPS60180911A JPS60180911A JP3424984A JP3424984A JPS60180911A JP S60180911 A JPS60180911 A JP S60180911A JP 3424984 A JP3424984 A JP 3424984A JP 3424984 A JP3424984 A JP 3424984A JP S60180911 A JPS60180911 A JP S60180911A
 - Authority
 - JP
 - Japan
 - Prior art keywords
 - silica
 - gel
 - acid
 - alkali silicate
 - melting
 - Prior art date
 - Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
 - Granted
 
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 222
 - 239000000377 silicon dioxide Substances 0.000 title claims abstract description 83
 - 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
 - 239000002245 particle Substances 0.000 claims abstract description 36
 - 229910052910 alkali metal silicate Inorganic materials 0.000 claims abstract description 25
 - XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 25
 - 238000002844 melting Methods 0.000 claims abstract description 21
 - 230000008018 melting Effects 0.000 claims abstract description 21
 - 239000000741 silica gel Substances 0.000 claims abstract description 21
 - 229910002027 silica gel Inorganic materials 0.000 claims abstract description 21
 - 239000002253 acid Substances 0.000 claims abstract description 18
 - NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims abstract description 16
 - RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims abstract description 16
 - 239000003456 ion exchange resin Substances 0.000 claims abstract description 12
 - 229920003303 ion-exchange polymer Polymers 0.000 claims abstract description 12
 - 239000004115 Sodium Silicate Substances 0.000 claims abstract description 10
 - 238000010438 heat treatment Methods 0.000 claims abstract description 10
 - NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims abstract description 10
 - 229910052911 sodium silicate Inorganic materials 0.000 claims abstract description 10
 - 230000002378 acidificating effect Effects 0.000 claims abstract description 9
 - 239000000941 radioactive substance Substances 0.000 claims abstract description 9
 - LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 claims abstract description 7
 - 238000009835 boiling Methods 0.000 claims abstract description 5
 - 239000000499 gel Substances 0.000 claims abstract description 5
 - 238000002386 leaching Methods 0.000 claims abstract description 4
 - 239000000243 solution Substances 0.000 claims description 27
 - 229960001866 silicon dioxide Drugs 0.000 claims description 18
 - 239000007864 aqueous solution Substances 0.000 claims description 17
 - 229960004029 silicic acid Drugs 0.000 claims description 6
 - 238000001694 spray drying Methods 0.000 claims description 4
 - BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 2
 - 238000000034 method Methods 0.000 abstract description 34
 - 239000012535 impurity Substances 0.000 abstract description 18
 - 239000000843 powder Substances 0.000 abstract description 12
 - 238000011282 treatment Methods 0.000 abstract description 9
 - QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 8
 - VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 7
 - QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 6
 - 238000006386 neutralization reaction Methods 0.000 abstract description 4
 - GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 3
 - 229910017604 nitric acid Inorganic materials 0.000 abstract description 3
 - VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 abstract description 2
 - 238000000605 extraction Methods 0.000 abstract 1
 - 238000005507 spraying Methods 0.000 abstract 1
 - 239000011347 resin Substances 0.000 description 12
 - 229920005989 resin Polymers 0.000 description 12
 - 239000005350 fused silica glass Substances 0.000 description 11
 - 239000002244 precipitate Substances 0.000 description 11
 - 150000003863 ammonium salts Chemical class 0.000 description 9
 - 239000000945 filler Substances 0.000 description 8
 - 239000002737 fuel gas Substances 0.000 description 8
 - 239000000047 product Substances 0.000 description 8
 - 238000001914 filtration Methods 0.000 description 7
 - 239000000126 substance Substances 0.000 description 7
 - QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
 - 239000001301 oxygen Substances 0.000 description 6
 - 229910052760 oxygen Inorganic materials 0.000 description 6
 - -1 silicate ester Chemical class 0.000 description 6
 - 238000006243 chemical reaction Methods 0.000 description 5
 - 238000001035 drying Methods 0.000 description 5
 - 238000001556 precipitation Methods 0.000 description 5
 - 239000000565 sealant Substances 0.000 description 5
 - 239000002002 slurry Substances 0.000 description 5
 - 239000003729 cation exchange resin Substances 0.000 description 4
 - 239000000463 material Substances 0.000 description 4
 - 239000012452 mother liquor Substances 0.000 description 4
 - 208000005156 Dehydration Diseases 0.000 description 3
 - XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
 - HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
 - 239000003513 alkali Substances 0.000 description 3
 - 229910052783 alkali metal Inorganic materials 0.000 description 3
 - 229910052784 alkaline earth metal Inorganic materials 0.000 description 3
 - 230000018044 dehydration Effects 0.000 description 3
 - 238000006297 dehydration reaction Methods 0.000 description 3
 - 239000008187 granular material Substances 0.000 description 3
 - 230000000704 physical effect Effects 0.000 description 3
 - 150000003839 salts Chemical class 0.000 description 3
 - 239000007858 starting material Substances 0.000 description 3
 - 238000005406 washing Methods 0.000 description 3
 - PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 2
 - ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 2
 - VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
 - NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
 - ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
 - 229910052776 Thorium Inorganic materials 0.000 description 2
 - 229910052770 Uranium Inorganic materials 0.000 description 2
 - 229910021529 ammonia Inorganic materials 0.000 description 2
 - 239000013522 chelant Substances 0.000 description 2
 - 239000000084 colloidal system Substances 0.000 description 2
 - 238000007796 conventional method Methods 0.000 description 2
 - 230000007423 decrease Effects 0.000 description 2
 - 230000006866 deterioration Effects 0.000 description 2
 - 229920001971 elastomer Polymers 0.000 description 2
 - 239000012776 electronic material Substances 0.000 description 2
 - 239000012065 filter cake Substances 0.000 description 2
 - 239000010419 fine particle Substances 0.000 description 2
 - 230000004927 fusion Effects 0.000 description 2
 - 239000007789 gas Substances 0.000 description 2
 - 238000010574 gas phase reaction Methods 0.000 description 2
 - 230000007062 hydrolysis Effects 0.000 description 2
 - 238000006460 hydrolysis reaction Methods 0.000 description 2
 - 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
 - 229910052751 metal Inorganic materials 0.000 description 2
 - 239000002184 metal Substances 0.000 description 2
 - 238000001000 micrograph Methods 0.000 description 2
 - 239000000203 mixture Substances 0.000 description 2
 - 229930014626 natural product Natural products 0.000 description 2
 - 230000007935 neutral effect Effects 0.000 description 2
 - 239000005022 packaging material Substances 0.000 description 2
 - 230000002285 radioactive effect Effects 0.000 description 2
 - 239000002994 raw material Substances 0.000 description 2
 - 239000005060 rubber Substances 0.000 description 2
 - 239000012266 salt solution Substances 0.000 description 2
 - 238000004062 sedimentation Methods 0.000 description 2
 - 239000005049 silicon tetrachloride Substances 0.000 description 2
 - 239000011734 sodium Substances 0.000 description 2
 - 238000003756 stirring Methods 0.000 description 2
 - 239000000758 substrate Substances 0.000 description 2
 - DNYWZCXLKNTFFI-UHFFFAOYSA-N uranium Chemical compound [U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U] DNYWZCXLKNTFFI-UHFFFAOYSA-N 0.000 description 2
 - ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 1
 - OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
 - VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
 - MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
 - DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
 - ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
 - LNSPFAOULBTYBI-UHFFFAOYSA-N [O].C#C Chemical group [O].C#C LNSPFAOULBTYBI-UHFFFAOYSA-N 0.000 description 1
 - ATRMIFNAYHCLJR-UHFFFAOYSA-N [O].CCC Chemical compound [O].CCC ATRMIFNAYHCLJR-UHFFFAOYSA-N 0.000 description 1
 - 239000003082 abrasive agent Substances 0.000 description 1
 - 238000000516 activation analysis Methods 0.000 description 1
 - 239000000853 adhesive Substances 0.000 description 1
 - 230000001070 adhesive effect Effects 0.000 description 1
 - 150000001340 alkali metals Chemical class 0.000 description 1
 - 150000001342 alkaline earth metals Chemical class 0.000 description 1
 - HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
 - AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
 - 239000001099 ammonium carbonate Substances 0.000 description 1
 - 235000012501 ammonium carbonate Nutrition 0.000 description 1
 - 235000019270 ammonium chloride Nutrition 0.000 description 1
 - 239000003957 anion exchange resin Substances 0.000 description 1
 - FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
 - 229910052791 calcium Inorganic materials 0.000 description 1
 - 239000011575 calcium Substances 0.000 description 1
 - 229920001429 chelating resin Polymers 0.000 description 1
 - 239000003795 chemical substances by application Substances 0.000 description 1
 - 150000001805 chlorine compounds Chemical class 0.000 description 1
 - 239000000701 coagulant Substances 0.000 description 1
 - 238000002485 combustion reaction Methods 0.000 description 1
 - 150000001875 compounds Chemical class 0.000 description 1
 - 239000000356 contaminant Substances 0.000 description 1
 - 238000011109 contamination Methods 0.000 description 1
 - 238000001816 cooling Methods 0.000 description 1
 - 230000007797 corrosion Effects 0.000 description 1
 - 238000005260 corrosion Methods 0.000 description 1
 - 238000011161 development Methods 0.000 description 1
 - 229910001882 dioxygen Inorganic materials 0.000 description 1
 - 238000006073 displacement reaction Methods 0.000 description 1
 - 238000009826 distribution Methods 0.000 description 1
 - 230000000694 effects Effects 0.000 description 1
 - 239000003792 electrolyte Substances 0.000 description 1
 - 239000008393 encapsulating agent Substances 0.000 description 1
 - 238000005516 engineering process Methods 0.000 description 1
 - 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
 - 238000000855 fermentation Methods 0.000 description 1
 - 230000004151 fermentation Effects 0.000 description 1
 - 238000007730 finishing process Methods 0.000 description 1
 - 239000012530 fluid Substances 0.000 description 1
 - 239000011521 glass Substances 0.000 description 1
 - 238000005469 granulation Methods 0.000 description 1
 - 230000003179 granulation Effects 0.000 description 1
 - 239000001257 hydrogen Substances 0.000 description 1
 - 229910052739 hydrogen Inorganic materials 0.000 description 1
 - 230000003301 hydrolyzing effect Effects 0.000 description 1
 - 238000009776 industrial production Methods 0.000 description 1
 - 230000002452 interceptive effect Effects 0.000 description 1
 - 238000005342 ion exchange Methods 0.000 description 1
 - 230000005865 ionizing radiation Effects 0.000 description 1
 - 150000002500 ions Chemical class 0.000 description 1
 - 229910052742 iron Inorganic materials 0.000 description 1
 - 239000007788 liquid Substances 0.000 description 1
 - 238000000691 measurement method Methods 0.000 description 1
 - 238000010309 melting process Methods 0.000 description 1
 - 150000002739 metals Chemical class 0.000 description 1
 - 239000008267 milk Substances 0.000 description 1
 - 210000004080 milk Anatomy 0.000 description 1
 - 235000013336 milk Nutrition 0.000 description 1
 - 230000003472 neutralizing effect Effects 0.000 description 1
 - 238000005554 pickling Methods 0.000 description 1
 - 229910052700 potassium Inorganic materials 0.000 description 1
 - 239000011591 potassium Substances 0.000 description 1
 - 239000011164 primary particle Substances 0.000 description 1
 - 238000012545 processing Methods 0.000 description 1
 - 239000001294 propane Substances 0.000 description 1
 - 238000010298 pulverizing process Methods 0.000 description 1
 - 238000000746 purification Methods 0.000 description 1
 - 239000012264 purified product Substances 0.000 description 1
 - 230000005855 radiation Effects 0.000 description 1
 - 230000005258 radioactive decay Effects 0.000 description 1
 - 239000012763 reinforcing filler Substances 0.000 description 1
 - 238000011160 research Methods 0.000 description 1
 - 238000007789 sealing Methods 0.000 description 1
 - 229910052708 sodium Inorganic materials 0.000 description 1
 - 235000011121 sodium hydroxide Nutrition 0.000 description 1
 - 235000019795 sodium metasilicate Nutrition 0.000 description 1
 - PHIQPXBZDGYJOG-UHFFFAOYSA-N sodium silicate nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.[Na+].[Na+].[O-][Si]([O-])=O PHIQPXBZDGYJOG-UHFFFAOYSA-N 0.000 description 1
 - 239000007921 spray Substances 0.000 description 1
 - 238000003860 storage Methods 0.000 description 1
 - 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
 - 239000000725 suspension Substances 0.000 description 1
 - 238000000108 ultra-filtration Methods 0.000 description 1
 - 230000004580 weight loss Effects 0.000 description 1
 
Landscapes
- Silicon Compounds (AREA)
 
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP3424984A JPS60180911A (ja) | 1984-02-27 | 1984-02-27 | 高純度シリカおよびその製造法 | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP3424984A JPS60180911A (ja) | 1984-02-27 | 1984-02-27 | 高純度シリカおよびその製造法 | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS60180911A true JPS60180911A (ja) | 1985-09-14 | 
| JPH0121091B2 JPH0121091B2 (pm) | 1989-04-19 | 
Family
ID=12408891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP3424984A Granted JPS60180911A (ja) | 1984-02-27 | 1984-02-27 | 高純度シリカおよびその製造法 | 
Country Status (1)
| Country | Link | 
|---|---|
| JP (1) | JPS60180911A (pm) | 
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| US4683128A (en) * | 1985-06-27 | 1987-07-28 | Nitto Chemical Industry Co., Ltd. | Process for manufacturing high purity silica | 
| KR100651243B1 (ko) | 2005-03-04 | 2006-11-30 | (주) 에스오씨 | 구형 실리카의 제조 방법 | 
| RU2481096C2 (ru) * | 2008-11-25 | 2013-05-10 | Дзе Проктер Энд Гэмбл Компани | Композиции для ухода за полостью рта с улучшенным очищающим эффектом | 
| JPWO2014188934A1 (ja) * | 2013-05-20 | 2017-02-23 | 日産化学工業株式会社 | シリカゾル及びシリカ含有エポキシ樹脂組成物 | 
| JP2024519512A (ja) * | 2022-04-25 | 2024-05-15 | 江蘇聯瑞新材料股▲ふん▼有限公司 | 超低誘電損失球状シリカ微粉末の調製方法 | 
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPS54141569A (en) * | 1978-04-26 | 1979-11-02 | Toshiba Corp | Semiconductor device | 
| JPS554952A (en) * | 1978-06-28 | 1980-01-14 | Toshiba Corp | Semiconductor device | 
| JPS5610947A (en) * | 1979-07-10 | 1981-02-03 | Toshiba Corp | Semiconductor sealing resin composition | 
| JPS5617919A (en) * | 1979-07-09 | 1981-02-20 | Ceskoslovenska Akademie Ved | Method of making silicic acid xerogel of large pore volume | 
| JPS56116647A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Manufacturing of silica-alumina type filler for semiconductor memory element covering resin | 
| JPS57195151A (en) * | 1981-05-27 | 1982-11-30 | Denki Kagaku Kogyo Kk | Low-radioactive resin composition | 
| JPS57212224A (en) * | 1981-06-24 | 1982-12-27 | Nitto Electric Ind Co Ltd | Epoxy resin composition for encapsulation of semiconductor | 
| JPS58145613A (ja) * | 1982-02-15 | 1983-08-30 | Denki Kagaku Kogyo Kk | 溶融シリカ球状体、その製造法およびその装置 | 
| JPS58151318A (ja) * | 1982-02-26 | 1983-09-08 | Shin Etsu Chem Co Ltd | 合成シリカおよびこれを含有してなる電子部品封止用樹脂組成物 | 
| JPS5954632A (ja) * | 1982-09-21 | 1984-03-29 | Mitsubishi Metal Corp | 石英ガラス粉末の製造法 | 
- 
        1984
        
- 1984-02-27 JP JP3424984A patent/JPS60180911A/ja active Granted
 
 
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPS54141569A (en) * | 1978-04-26 | 1979-11-02 | Toshiba Corp | Semiconductor device | 
| JPS554952A (en) * | 1978-06-28 | 1980-01-14 | Toshiba Corp | Semiconductor device | 
| JPS5617919A (en) * | 1979-07-09 | 1981-02-20 | Ceskoslovenska Akademie Ved | Method of making silicic acid xerogel of large pore volume | 
| JPS5610947A (en) * | 1979-07-10 | 1981-02-03 | Toshiba Corp | Semiconductor sealing resin composition | 
| JPS56116647A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Manufacturing of silica-alumina type filler for semiconductor memory element covering resin | 
| JPS57195151A (en) * | 1981-05-27 | 1982-11-30 | Denki Kagaku Kogyo Kk | Low-radioactive resin composition | 
| JPS57212224A (en) * | 1981-06-24 | 1982-12-27 | Nitto Electric Ind Co Ltd | Epoxy resin composition for encapsulation of semiconductor | 
| JPS58145613A (ja) * | 1982-02-15 | 1983-08-30 | Denki Kagaku Kogyo Kk | 溶融シリカ球状体、その製造法およびその装置 | 
| JPS58151318A (ja) * | 1982-02-26 | 1983-09-08 | Shin Etsu Chem Co Ltd | 合成シリカおよびこれを含有してなる電子部品封止用樹脂組成物 | 
| JPS5954632A (ja) * | 1982-09-21 | 1984-03-29 | Mitsubishi Metal Corp | 石英ガラス粉末の製造法 | 
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| US4683128A (en) * | 1985-06-27 | 1987-07-28 | Nitto Chemical Industry Co., Ltd. | Process for manufacturing high purity silica | 
| KR100651243B1 (ko) | 2005-03-04 | 2006-11-30 | (주) 에스오씨 | 구형 실리카의 제조 방법 | 
| RU2481096C2 (ru) * | 2008-11-25 | 2013-05-10 | Дзе Проктер Энд Гэмбл Компани | Композиции для ухода за полостью рта с улучшенным очищающим эффектом | 
| RU2486890C2 (ru) * | 2008-11-25 | 2013-07-10 | Дзе Проктер Энд Гэмбл Компани | Композиции для ухода за полостью рта, содержащие аморфный кварц | 
| JPWO2014188934A1 (ja) * | 2013-05-20 | 2017-02-23 | 日産化学工業株式会社 | シリカゾル及びシリカ含有エポキシ樹脂組成物 | 
| JP2024519512A (ja) * | 2022-04-25 | 2024-05-15 | 江蘇聯瑞新材料股▲ふん▼有限公司 | 超低誘電損失球状シリカ微粉末の調製方法 | 
Also Published As
| Publication number | Publication date | 
|---|---|
| JPH0121091B2 (pm) | 1989-04-19 | 
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