JPS6016766U - Band-shaped silicon crystal production equipment - Google Patents

Band-shaped silicon crystal production equipment

Info

Publication number
JPS6016766U
JPS6016766U JP9606584U JP9606584U JPS6016766U JP S6016766 U JPS6016766 U JP S6016766U JP 9606584 U JP9606584 U JP 9606584U JP 9606584 U JP9606584 U JP 9606584U JP S6016766 U JPS6016766 U JP S6016766U
Authority
JP
Japan
Prior art keywords
band
shaped silicon
crystal
silicon crystal
capillary die
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9606584U
Other languages
Japanese (ja)
Inventor
中川　公史
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP9606584U priority Critical patent/JPS6016766U/en
Publication of JPS6016766U publication Critical patent/JPS6016766U/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の温度調整部材を備えた引上
げ装置を示す概念図、第２図および第３図は本考案の効
果を説明するための装置内縦方向温度分布を示す図、第
４図は帯状シリコン結晶の引上げの原理を説明する図、
第５図は横方向に移動可能な温度調整部材を備えた引上
げ装置を示す概念図である。 １１・・・ルツボ、１２（１２ａ、　　１２ｂ）・・・
＋ヤヒラリ・ダイ、１３・・・シリコン融液、１４・・
・帯状シリコン結晶、１６・・・ヒータ、１７・・・ガ
ス遮蔽板、１８（１８３〜１８ｄ）・・・カーボン板（
温度調整部材）、１９（１９ａ〜１９ｄ）−・・連結棒
。FIG. 1 is a conceptual diagram showing a pulling device equipped with a temperature adjustment member according to an embodiment of the present invention, and FIGS. 2 and 3 are diagrams showing longitudinal temperature distribution within the device to explain the effects of the present invention. , Figure 4 is a diagram explaining the principle of pulling a band-shaped silicon crystal,
FIG. 5 is a conceptual diagram showing a pulling device equipped with a laterally movable temperature regulating member. 11... Crucible, 12 (12a, 12b)...
+ Yahirari die, 13... silicon melt, 14...
・Striped silicon crystal, 16... Heater, 17... Gas shielding plate, 18 (183-18d)... Carbon plate (
temperature adjustment member), 19 (19a to 19d)--connecting rod.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）シリコン融液を収納したルツボにスリットを有す
るキャピラリ・ダイを配し、前記スリットを介して上昇
した融液に種子結晶を接触させ、この種子結晶を引上げ
ることにより帯状シリコン結晶を引上げる装置において
、前記キャピラリ・ダイの上部周辺にシリコン溶融用熱
エネルギーに起因する輻射熱によって温度上昇する熱遮
蔽体からなる温度調整部材を固液界面近傍にて上下方向
移動自在に配置しかつ前記帯状結晶の引上げ方向におい
て前記固液界面の温度勾配が急峻になる位置に前記温度
調整部材を設定す、　る連結棒を具備することを特徴と
する帯状シリコン結晶の製造装置。(1) A capillary die with a slit is arranged in a crucible containing a silicon melt, a seed crystal is brought into contact with the melt rising through the slit, and the band-shaped silicon crystal is pulled by pulling up the seed crystal. In the apparatus for raising the capillary die, a temperature adjustment member made of a heat shield whose temperature increases due to radiant heat caused by silicon melting thermal energy is disposed around the upper part of the capillary die so as to be movable in the vertical direction near the solid-liquid interface, and An apparatus for manufacturing a band-shaped silicon crystal, comprising a connecting rod that sets the temperature adjusting member at a position where the temperature gradient at the solid-liquid interface becomes steep in the crystal pulling direction. （２）温度調整部材は、複数個に分割され、それぞれ独
立に上下方向に移動可能としたカーボン板、である実用
新案登録請求の範囲第１項記載の帯状シリコン結晶の製
造装置。(2) The apparatus for producing a band-shaped silicon crystal according to claim 1, wherein the temperature adjustment member is a carbon plate that is divided into a plurality of parts and each can be moved vertically independently.
JP9606584U 1984-06-28 1984-06-28 Band-shaped silicon crystal production equipment Pending JPS6016766U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9606584U JPS6016766U (en) 1984-06-28 1984-06-28 Band-shaped silicon crystal production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9606584U JPS6016766U (en) 1984-06-28 1984-06-28 Band-shaped silicon crystal production equipment

Publications (1)

Publication Number Publication Date
JPS6016766U true JPS6016766U (en) 1985-02-04

Family

ID=30229117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9606584U Pending JPS6016766U (en) 1984-06-28 1984-06-28 Band-shaped silicon crystal production equipment

Country Status (1)

Country Link
JP (1) JPS6016766U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52143978A (en) * 1976-05-26 1977-11-30 Japan Solar Energy Method of pulling up single crystal ribbons
JPS54134083A (en) * 1978-04-11 1979-10-18 Agency Of Ind Science & Technol Belt type silicon crystallizer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52143978A (en) * 1976-05-26 1977-11-30 Japan Solar Energy Method of pulling up single crystal ribbons
JPS54134083A (en) * 1978-04-11 1979-10-18 Agency Of Ind Science & Technol Belt type silicon crystallizer

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