JPS6016446A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6016446A
JPS6016446A JP12449783A JP12449783A JPS6016446A JP S6016446 A JPS6016446 A JP S6016446A JP 12449783 A JP12449783 A JP 12449783A JP 12449783 A JP12449783 A JP 12449783A JP S6016446 A JPS6016446 A JP S6016446A
Authority
JP
Japan
Prior art keywords
film
films
thin film
insulating film
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12449783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427693B2 (enrdf_load_stackoverflow
Inventor
Motoaki Abe
元昭 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP12449783A priority Critical patent/JPS6016446A/ja
Publication of JPS6016446A publication Critical patent/JPS6016446A/ja
Publication of JPH0427693B2 publication Critical patent/JPH0427693B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP12449783A 1983-07-08 1983-07-08 半導体装置の製造方法 Granted JPS6016446A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12449783A JPS6016446A (ja) 1983-07-08 1983-07-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12449783A JPS6016446A (ja) 1983-07-08 1983-07-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6016446A true JPS6016446A (ja) 1985-01-28
JPH0427693B2 JPH0427693B2 (enrdf_load_stackoverflow) 1992-05-12

Family

ID=14886950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12449783A Granted JPS6016446A (ja) 1983-07-08 1983-07-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6016446A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01265541A (ja) * 1988-04-15 1989-10-23 Fujitsu Ltd 半導体装置
JPH03161973A (ja) * 1989-11-21 1991-07-11 Nec Corp 固体撮像装置
JPH03225915A (ja) * 1990-01-31 1991-10-04 Sharp Corp 固体撮像素子

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01265541A (ja) * 1988-04-15 1989-10-23 Fujitsu Ltd 半導体装置
JPH03161973A (ja) * 1989-11-21 1991-07-11 Nec Corp 固体撮像装置
JPH03225915A (ja) * 1990-01-31 1991-10-04 Sharp Corp 固体撮像素子

Also Published As

Publication number Publication date
JPH0427693B2 (enrdf_load_stackoverflow) 1992-05-12

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