JPS60161652A - 半導体立体回路素子の製造方法 - Google Patents

半導体立体回路素子の製造方法

Info

Publication number
JPS60161652A
JPS60161652A JP59016166A JP1616684A JPS60161652A JP S60161652 A JPS60161652 A JP S60161652A JP 59016166 A JP59016166 A JP 59016166A JP 1616684 A JP1616684 A JP 1616684A JP S60161652 A JPS60161652 A JP S60161652A
Authority
JP
Japan
Prior art keywords
film
single crystal
circuit element
spinel
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59016166A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336307B2 (enrdf_load_stackoverflow
Inventor
Takao Hashimoto
孝男 橋本
Isao Nakano
中野　勇男
Hiroyuki Aoe
青江　弘行
Takashi Nakakado
中門　孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59016166A priority Critical patent/JPS60161652A/ja
Publication of JPS60161652A publication Critical patent/JPS60161652A/ja
Publication of JPH0336307B2 publication Critical patent/JPH0336307B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP59016166A 1984-02-02 1984-02-02 半導体立体回路素子の製造方法 Granted JPS60161652A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59016166A JPS60161652A (ja) 1984-02-02 1984-02-02 半導体立体回路素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59016166A JPS60161652A (ja) 1984-02-02 1984-02-02 半導体立体回路素子の製造方法

Publications (2)

Publication Number Publication Date
JPS60161652A true JPS60161652A (ja) 1985-08-23
JPH0336307B2 JPH0336307B2 (enrdf_load_stackoverflow) 1991-05-31

Family

ID=11908919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59016166A Granted JPS60161652A (ja) 1984-02-02 1984-02-02 半導体立体回路素子の製造方法

Country Status (1)

Country Link
JP (1) JPS60161652A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338278A (en) * 1976-09-20 1978-04-08 Fujitsu Ltd Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338278A (en) * 1976-09-20 1978-04-08 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
JPH0336307B2 (enrdf_load_stackoverflow) 1991-05-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term