JPS60156466U - Icモジユ−ル検査装置 - Google Patents
Icモジユ−ル検査装置Info
- Publication number
- JPS60156466U JPS60156466U JP4489284U JP4489284U JPS60156466U JP S60156466 U JPS60156466 U JP S60156466U JP 4489284 U JP4489284 U JP 4489284U JP 4489284 U JP4489284 U JP 4489284U JP S60156466 U JPS60156466 U JP S60156466U
- Authority
- JP
- Japan
- Prior art keywords
- module
- inspection equipment
- module inspection
- tested
- measurement portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4489284U JPS60156466U (ja) | 1984-03-28 | 1984-03-28 | Icモジユ−ル検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4489284U JPS60156466U (ja) | 1984-03-28 | 1984-03-28 | Icモジユ−ル検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60156466U true JPS60156466U (ja) | 1985-10-18 |
JPH0119106Y2 JPH0119106Y2 (enrdf_load_html_response) | 1989-06-02 |
Family
ID=30557883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4489284U Granted JPS60156466U (ja) | 1984-03-28 | 1984-03-28 | Icモジユ−ル検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60156466U (enrdf_load_html_response) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125639A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Inspection apparatus |
-
1984
- 1984-03-28 JP JP4489284U patent/JPS60156466U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125639A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Inspection apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0119106Y2 (enrdf_load_html_response) | 1989-06-02 |
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