JPS60153174A - 圧覚センサ - Google Patents

圧覚センサ

Info

Publication number
JPS60153174A
JPS60153174A JP59008785A JP878584A JPS60153174A JP S60153174 A JPS60153174 A JP S60153174A JP 59008785 A JP59008785 A JP 59008785A JP 878584 A JP878584 A JP 878584A JP S60153174 A JPS60153174 A JP S60153174A
Authority
JP
Japan
Prior art keywords
wiring
pressure sensor
type
epitaxial layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59008785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473630B2 (enrdf_load_stackoverflow
Inventor
Teizo Takahama
高浜　禎造
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59008785A priority Critical patent/JPS60153174A/ja
Publication of JPS60153174A publication Critical patent/JPS60153174A/ja
Publication of JPH0473630B2 publication Critical patent/JPH0473630B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59008785A 1984-01-20 1984-01-20 圧覚センサ Granted JPS60153174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59008785A JPS60153174A (ja) 1984-01-20 1984-01-20 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59008785A JPS60153174A (ja) 1984-01-20 1984-01-20 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60153174A true JPS60153174A (ja) 1985-08-12
JPH0473630B2 JPH0473630B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=11702520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59008785A Granted JPS60153174A (ja) 1984-01-20 1984-01-20 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60153174A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0473630B2 (enrdf_load_stackoverflow) 1992-11-24

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