JPH0473629B2 - - Google Patents

Info

Publication number
JPH0473629B2
JPH0473629B2 JP59008783A JP878384A JPH0473629B2 JP H0473629 B2 JPH0473629 B2 JP H0473629B2 JP 59008783 A JP59008783 A JP 59008783A JP 878384 A JP878384 A JP 878384A JP H0473629 B2 JPH0473629 B2 JP H0473629B2
Authority
JP
Japan
Prior art keywords
pressure
force
pressure sensor
strain gauge
strain gauges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59008783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60153172A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59008783A priority Critical patent/JPS60153172A/ja
Publication of JPS60153172A publication Critical patent/JPS60153172A/ja
Publication of JPH0473629B2 publication Critical patent/JPH0473629B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59008783A 1984-01-20 1984-01-20 圧覚センサ Granted JPS60153172A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59008783A JPS60153172A (ja) 1984-01-20 1984-01-20 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59008783A JPS60153172A (ja) 1984-01-20 1984-01-20 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60153172A JPS60153172A (ja) 1985-08-12
JPH0473629B2 true JPH0473629B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=11702468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59008783A Granted JPS60153172A (ja) 1984-01-20 1984-01-20 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60153172A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153171A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd ２セル型圧覚センサ
JPS63155677A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 触覚センサと基板の接続方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153171A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd ２セル型圧覚センサ

Also Published As

Publication number Publication date
JPS60153172A (ja) 1985-08-12

Similar Documents

Publication Publication Date Title
US4695963A (en) Pressure sense recognition control system
US7428841B2 (en) Acceleration sensor and inclination-detecting method
JPH0663892B2 (ja) 圧覚認識制御装置
JPH0577304B2 (enrdf_load_stackoverflow)
JPH0473629B2 (enrdf_load_stackoverflow)
JP3025313B2 (ja) 静電容量の変化を利用したセンサの製造方法
JPH05281251A (ja) 加速度センサおよびその製造方法
JPH0560269B2 (enrdf_load_stackoverflow)
JPH0584870B2 (enrdf_load_stackoverflow)
JPH05340957A (ja) 半導体センサの製造方法および半導体センサ
JPS61224465A (ja) 力センサ及びその製造方法
JPS60153175A (ja) 圧覚センサ
JPH08160070A (ja) 加速度センサ
JP3034620B2 (ja) 三次元加速度センサ
JPH0473631B2 (enrdf_load_stackoverflow)
JPH0473630B2 (enrdf_load_stackoverflow)
JP2746298B2 (ja) 二成分以上の力検出装置
JP2728569B2 (ja) 分布型触覚センサ
JPH0793445B2 (ja) 圧覚センサ
JP2587255B2 (ja) 力検出装置
CN119984615A (zh) 多维力传感器及加工方法
JPH0411348B2 (enrdf_load_stackoverflow)
JPS60153173A (ja) 圧覚センサ
US20090095076A1 (en) Acceleration Sensor Device and Sensor Apparatus
JPS60154677A (ja) 圧覚センサ